{"title":"The design, fabrication and characterization of GaAs-based RTT with groove and self-aligned Schottky gate structure","authors":"Wei-lian Guo, P. Niu, Xiao-yun Li, Chang-yun Miao, Wei Wang, Xin Yu, Yaoyao Shang, Zhen Feng, Guoping Tian, Yali Li, Yongqiang Liu, Mingwen Yuan, Xiao-Bai Li","doi":"10.1109/ICSICT.2008.4734594","DOIUrl":null,"url":null,"abstract":"In this paper, the design of material structure and device structure , fabrication processing and characterization on GaAs based Resonant Tunneling Transistor (RTT) with groove and self-aligned gate structure have been described completely and systematically .The experimental results measured from our fabricated RTT show that : the maximum value of Peak to Valley Current Ratio (PVCR) is 46, the transconductance gm is in a range of 1.3~8.0 ms, the cutoff frequency fTgm and speed index S are 1.59 GHz and 13.5 ps/V respectively .","PeriodicalId":436457,"journal":{"name":"2008 9th International Conference on Solid-State and Integrated-Circuit Technology","volume":"53 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 9th International Conference on Solid-State and Integrated-Circuit Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.2008.4734594","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, the design of material structure and device structure , fabrication processing and characterization on GaAs based Resonant Tunneling Transistor (RTT) with groove and self-aligned gate structure have been described completely and systematically .The experimental results measured from our fabricated RTT show that : the maximum value of Peak to Valley Current Ratio (PVCR) is 46, the transconductance gm is in a range of 1.3~8.0 ms, the cutoff frequency fTgm and speed index S are 1.59 GHz and 13.5 ps/V respectively .
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