A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining

19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI:10.1109/MEMSYS.2006.1627799

M. T. Richardson, Y. Gianchandani, D. Skala

引用次数: 10

Abstract

This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) of 316L stainless steel. Lithographically fabricated copper tools with parallel line features of 5-50 μm width and 5-75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As tool feature density increased, debris accumulation effects began to dominate, eventually destroying both tool and workpiece. A two-step hydrodynamic debris removal technique yielded significant improvements in surface and edge finish, machining time, and tool wear over past work using standard vertical dither flushing.

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微细电火花加工中尺寸公差与流体动力碎屑去除的参数化研究

对316L不锈钢的批量微放电加工(μEDM)进行了详细的评价。采用平行线宽度为5-50 μm、间距为5-75 μm的光刻加工铜刀具，量化加工公差趋势和碎屑堆积影响。随着刀具特征密度的增加，碎屑堆积效应开始占主导地位，最终破坏刀具和工件。两步流体动力碎屑清除技术在表面和边缘光洁度、加工时间和刀具磨损方面取得了显着改善，而不是过去使用标准的垂直抖动冲洗。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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19th IEEE International Conference on Micro Electro Mechanical Systems

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