Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627838
T. Nisisako, T. Torii, T. Higuchi
This paper presents a versatile microfluidic platform for producing anisotropic polymeric microparticles of controlled sizes and size distributions. Using a planar sheath-flow geometry fabricated on a glass chip, we generated monodisperse organic droplets consisting of two differently colored miscible segments; these droplets were subsequently polymerized to form monodisperse Janus microspheres having both electrical and color anisotropy. Those particles could be used for an electronic paper application. We also engineered particles of geometrical anisotropy by using two immiscible organic fluids as the raw material. Multiple-channel integration for scale-up of productivity was also demonstrated.
{"title":"Monodisperse Anisotropic Polymeric Particles Generated from a Micro Co-Flow System","authors":"T. Nisisako, T. Torii, T. Higuchi","doi":"10.1109/MEMSYS.2006.1627838","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627838","url":null,"abstract":"This paper presents a versatile microfluidic platform for producing anisotropic polymeric microparticles of controlled sizes and size distributions. Using a planar sheath-flow geometry fabricated on a glass chip, we generated monodisperse organic droplets consisting of two differently colored miscible segments; these droplets were subsequently polymerized to form monodisperse Janus microspheres having both electrical and color anisotropy. Those particles could be used for an electronic paper application. We also engineered particles of geometrical anisotropy by using two immiscible organic fluids as the raw material. Multiple-channel integration for scale-up of productivity was also demonstrated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115367840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627734
M. Yamada, M. Seki
A microfluidic bio-particle sorter has been developed utilizing a concept that a microchannel network acts as a resistive circuit when a Newtonian fluid is continuously introduced into the network. By hydrodynamically rectifying the particle positions inside the microfluidic circuit, particles suspended in liquid are perfectly aligned onto one sidewall inside the microchannel, and then concentrated and sorted according to size. We used particles with diameter of 1~ 3 μm; they were concentrated 30~ 80-fold, and separated even when the difference in particle diameter was smaller than 1 μm. In addition, it was demonstrated that the distributed flow rates well corresponded to the theoretical values.
{"title":"Bio-Particle Sorting Employing Hydrodynamic Rectification in a Microfluidic Circuit","authors":"M. Yamada, M. Seki","doi":"10.1109/MEMSYS.2006.1627734","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627734","url":null,"abstract":"A microfluidic bio-particle sorter has been developed utilizing a concept that a microchannel network acts as a resistive circuit when a Newtonian fluid is continuously introduced into the network. By hydrodynamically rectifying the particle positions inside the microfluidic circuit, particles suspended in liquid are perfectly aligned onto one sidewall inside the microchannel, and then concentrated and sorted according to size. We used particles with diameter of 1~ 3 μm; they were concentrated 30~ 80-fold, and separated even when the difference in particle diameter was smaller than 1 μm. In addition, it was demonstrated that the distributed flow rates well corresponded to the theoretical values.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115609804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627796
E. Quevy, R. Howe, T. King
This paper reports a novel method for heterogeneous integration by re-embedding diced chips into a carrier wafer. We rely on capillary forces to register embedded chips to their carrier with sub-micron accuracy, as well as on a novel sedimentation method to solidly seal the chips into the carrier. By creating a CMOS-clean reconstituted wafer ready for subsequent process steps, this approach enables the integration of technologies that were originally incompatible in terms of substrate material, substrate size, and/or thermal budget, while retaining the benefits of batch processing.
{"title":"Reconstituted Wafer Technology for Heterogeneous Integration","authors":"E. Quevy, R. Howe, T. King","doi":"10.1109/MEMSYS.2006.1627796","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627796","url":null,"abstract":"This paper reports a novel method for heterogeneous integration by re-embedding diced chips into a carrier wafer. We rely on capillary forces to register embedded chips to their carrier with sub-micron accuracy, as well as on a novel sedimentation method to solidly seal the chips into the carrier. By creating a CMOS-clean reconstituted wafer ready for subsequent process steps, this approach enables the integration of technologies that were originally incompatible in terms of substrate material, substrate size, and/or thermal budget, while retaining the benefits of batch processing.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114955463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627881
C. Ko, J. Wu, Wen-Chih Wang, Ching-Hsiao Huang, S. Tseng, Yung-Lin Chen, M.S.-C. Lu
This paper describes the design and characterization of a capacitive tactile sensor fabricated in a conventional CMOS process. To achieve a high capacitive sensitivity, an oscillator circuit is adopted to convert the pressure induced capacitive change to an output frequency shift. The complete post micromachining steps are performed on a CMOS die without resorting to a wafer process. The pressure-sensing membrane has a total size of 200 µ m × 200 µ m with an initial sensing capacitance of 153 fF. Experimental results show an initial frequency output at 48.96 MHz under no applied load. The total frequency shift is 13.5 MHz with a corresponding membrane displacement of 0.56 µ m and a capacitance change of 63 fF, averaging 0.21 MHz/fF. The measured force sensitivity is 26.1 kHz/µ N.
{"title":"A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor","authors":"C. Ko, J. Wu, Wen-Chih Wang, Ching-Hsiao Huang, S. Tseng, Yung-Lin Chen, M.S.-C. Lu","doi":"10.1109/MEMSYS.2006.1627881","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627881","url":null,"abstract":"This paper describes the design and characterization of a capacitive tactile sensor fabricated in a conventional CMOS process. To achieve a high capacitive sensitivity, an oscillator circuit is adopted to convert the pressure induced capacitive change to an output frequency shift. The complete post micromachining steps are performed on a CMOS die without resorting to a wafer process. The pressure-sensing membrane has a total size of 200 µ m × 200 µ m with an initial sensing capacitance of 153 fF. Experimental results show an initial frequency output at 48.96 MHz under no applied load. The total frequency shift is 13.5 MHz with a corresponding membrane displacement of 0.56 µ m and a capacitance change of 63 fF, averaging 0.21 MHz/fF. The measured force sensitivity is 26.1 kHz/µ N.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115025638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627725
S. Youn, Dong Woo Lee, Young‐Ho Cho
It is the first proposal to monitor cell deformability based on the lysis rate difference measured from the cells passing through a filter array having gradually increased orifice length. Compared to the previous methods [ 1-4], the present chips offer simple and inexpensive monitoring with high sensitivity. In the experimental study, we use normal and chemically treated erythrocytes to verify the performance of the present chips. Using the fabricated chips, T-device and L-device measure the maximum lysis rate difference between the normal and the treated erythrocytes at the second filter, respectively having 6.7μm- and 4.3μm-long orifices. We achieved more than 40 times improvement in the ratio of the average signals for normal erythrocytes to that of chemically treated erythrocytes.
{"title":"Cell Deformability Monitoring Chips Based on Orifice-Length-Dependent Digital Lysis Rates","authors":"S. Youn, Dong Woo Lee, Young‐Ho Cho","doi":"10.1109/MEMSYS.2006.1627725","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627725","url":null,"abstract":"It is the first proposal to monitor cell deformability based on the lysis rate difference measured from the cells passing through a filter array having gradually increased orifice length. Compared to the previous methods [ 1-4], the present chips offer simple and inexpensive monitoring with high sensitivity. In the experimental study, we use normal and chemically treated erythrocytes to verify the performance of the present chips. Using the fabricated chips, T-device and L-device measure the maximum lysis rate difference between the normal and the treated erythrocytes at the second filter, respectively having 6.7μm- and 4.3μm-long orifices. We achieved more than 40 times improvement in the ratio of the average signals for normal erythrocytes to that of chemically treated erythrocytes.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116584971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627727
L. Gey, G. Amberg, Wouter van der Wijngaart, G. Stemme
We introduce and successfully demonstrate a novel method and system for subsequent dispensing, mixing and ejecting of picolitre liquid samples in a single step. The system consists of a free liquid film, suspended in a frame and positioned in front of a droplet dispenser. In this study we tested and modelled the flight of liquid droplets, ejected from an inkjet print head, through a suspended liquid film. Model and experiment are in accordance.
{"title":"Study of the Flight of Small Liquid Droplets Through a Thin Liquid Film for Picolitre Liquid Transfer","authors":"L. Gey, G. Amberg, Wouter van der Wijngaart, G. Stemme","doi":"10.1109/MEMSYS.2006.1627727","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627727","url":null,"abstract":"We introduce and successfully demonstrate a novel method and system for subsequent dispensing, mixing and ejecting of picolitre liquid samples in a single step. The system consists of a free liquid film, suspended in a frame and positioned in front of a droplet dispenser. In this study we tested and modelled the flight of liquid droplets, ejected from an inkjet print head, through a suspended liquid film. Model and experiment are in accordance.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"162 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114585253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627811
R. Yalavarthy, C. Wilson
This paper reports on S-MAyHEM, a new magnetic microdevice that magnetically confines on-chip microplasmas (small-scale electric discharges) for spectroscopic molecular gas analysis. Micromagnets in an epoxy casing form the shell of an on-chip hollow cathode. Voltage is applied to this structure under vacuum, creating an on-chip discharge, which is found to be an order of magnitude brighter than seen in previously described microplasma devices [ 1]. This device has been shown to detect and discriminate HCl, Alcohol, and ammonia vapors; all three of these ingredients are used to manufacture homemade bombs.
{"title":"S-MAyHEM: A Spectroscopic Microanalytical Hollow Enhanced Magnetron for Explosive Gas Detection","authors":"R. Yalavarthy, C. Wilson","doi":"10.1109/MEMSYS.2006.1627811","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627811","url":null,"abstract":"This paper reports on S-MAyHEM, a new magnetic microdevice that magnetically confines on-chip microplasmas (small-scale electric discharges) for spectroscopic molecular gas analysis. Micromagnets in an epoxy casing form the shell of an on-chip hollow cathode. Voltage is applied to this structure under vacuum, creating an on-chip discharge, which is found to be an order of magnitude brighter than seen in previously described microplasma devices [ 1]. This device has been shown to detect and discriminate HCl, Alcohol, and ammonia vapors; all three of these ingredients are used to manufacture homemade bombs.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116738784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627789
W. Su, Sheng-Ta Lee, M. Tsai, W. Fang
This study presents a simple process to realize the lithography and deposition on a complicated 3D substrate surface conformally. The 3D lithography and patterning on highly structured surface is implemented using the SAM coating and the plasma treatment. Moreover, the selective film deposition on 3D surface and even underneath the suspended microstructures is realized using the contact displacement electroless plating (CDE plating). In applications, the Cu film was conformally plated and patterned on a Si substrate with 50μm~200μm deep cavities and 54.7°~90° sidewalls. Moreover, the Cu electrode underneath suspended microbeams was also plated.
{"title":"3D Lithography and Deposition on Highly Structured Surfaces Using Plasma Surface Modification, SAM Coating, and Contact Displacement Electroless Plating","authors":"W. Su, Sheng-Ta Lee, M. Tsai, W. Fang","doi":"10.1109/MEMSYS.2006.1627789","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627789","url":null,"abstract":"This study presents a simple process to realize the lithography and deposition on a complicated 3D substrate surface conformally. The 3D lithography and patterning on highly structured surface is implemented using the SAM coating and the plasma treatment. Moreover, the selective film deposition on 3D surface and even underneath the suspended microstructures is realized using the contact displacement electroless plating (CDE plating). In applications, the Cu film was conformally plated and patterned on a Si substrate with 50μm~200μm deep cavities and 54.7°~90° sidewalls. Moreover, the Cu electrode underneath suspended microbeams was also plated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117089751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627845
E. R. Parker, M. Rao, K. Turner, N. MacDonald
Recent developments have allowed for the bulk micromachining of titanium for MEMS applications. Biomedical microsystems in particular can benefit from the high fracture toughness and biocompatibility associated with titanium. This paper reports on the design and fabrication of an in-plane, bulk titanium microneedle device using multilayer lamination. Thin titanium foils are patterned, etched, and bonded together to form microneedle arrays. A microfluidic network embedded within these arrays allows for controlled fluid delivery through the device. This fabrication approach offers a novel, robust platform for transdermal drug delivery applications.
{"title":"Bulk Titanium Microneedles with Embedded Microfluidic Networks for Transdermal Drug Delivery","authors":"E. R. Parker, M. Rao, K. Turner, N. MacDonald","doi":"10.1109/MEMSYS.2006.1627845","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627845","url":null,"abstract":"Recent developments have allowed for the bulk micromachining of titanium for MEMS applications. Biomedical microsystems in particular can benefit from the high fracture toughness and biocompatibility associated with titanium. This paper reports on the design and fabrication of an in-plane, bulk titanium microneedle device using multilayer lamination. Thin titanium foils are patterned, etched, and bonded together to form microneedle arrays. A microfluidic network embedded within these arrays allows for controlled fluid delivery through the device. This fabrication approach offers a novel, robust platform for transdermal drug delivery applications.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129603215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-05-08DOI: 10.1109/MEMSYS.2006.1627921
Z. Ding, B. Ziaie
This paper describes a frequency controlled bidirectional ratcheting biomimetic motion of a cylindrical soft body similar to the motion of limbless creatures such as worms and some insects. Using a laterally vibrating shaker table, we achieved a bidirectional motion by simply attached two polydimethylsiloxane (PDMS) rods with opposing saw-tooth shaped legs. These two parts have different ratchet density and leg height. The polymeric body was floating on a thin silicone lubricating oil 20 μm in thickness. While vibrated at a constant amplitude of 0.2 mm, the micromobile soft cylinder (2x2x20 mm3in dimensions) changed its motion direction at a cross-over frequency of 156 Hz. This cross-over phenomena is due to difference between the static and kinetic friction of the two opposing parts.
{"title":"Frequency Controlled Bidirectional Ratcheting Biomimetic Motion","authors":"Z. Ding, B. Ziaie","doi":"10.1109/MEMSYS.2006.1627921","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627921","url":null,"abstract":"This paper describes a frequency controlled bidirectional ratcheting biomimetic motion of a cylindrical soft body similar to the motion of limbless creatures such as worms and some insects. Using a laterally vibrating shaker table, we achieved a bidirectional motion by simply attached two polydimethylsiloxane (PDMS) rods with opposing saw-tooth shaped legs. These two parts have different ratchet density and leg height. The polymeric body was floating on a thin silicone lubricating oil 20 μm in thickness. While vibrated at a constant amplitude of 0.2 mm, the micromobile soft cylinder (2x2x20 mm3in dimensions) changed its motion direction at a cross-over frequency of 156 Hz. This cross-over phenomena is due to difference between the static and kinetic friction of the two opposing parts.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128804718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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