Charge pump detector: Optimization with process and device simulation

Abstract

The charge pump pixel detector concept was developed to meet the requirements of X-ray correlation spectroscopy. The sensor is built in high-resistivity silicon with front and backside diffused regions and double metal processing on the front side. The design is targeted for low noise of less than 100 e noise, high quantum efficiency for 8KeV photons, 8mS readout for the entire array, and dynamic range of 100 photons. The pixel size is 56μm by 56μm. In the current work, extensive TCAD simulations were used to optimize the device structure, the bias conditions, and the process conditions. 3D simulations under dynamic switching conditions were executed to study charge cloud evolution, charge storage, and readout.