{"title":"Design and fabrication for inertial micro sensors","authors":"Guoying Wu, Zhixiong Xiao, Zhihong Li, Y. Hao","doi":"10.1109/ICSICT.1998.786512","DOIUrl":null,"url":null,"abstract":"This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.","PeriodicalId":286980,"journal":{"name":"1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-10-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.1998.786512","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
This paper mainly reviews the design rules and working principles of the main inertial sensors, which include the accelerometer and gyroscope, and the main micromachining technology used at the present time. The main research projects on the inertial sensors at the Institute of Microelectronics, Peking University, have been also illustrated.
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