A New Micro-Four-Point Probe Design for Various Applications

Abstract

In this paper, we proposed a new micro-four-point-probe (¿4PP) with sharp tips arranged in squire and spacing 20¿m. The ¿4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified ¿4PP structure can be also used as a micro-gripper to move micro/nano-objects. A spring constant of the fabricated sub-cantilevers is less than 1.5N/m which is suitable for fragile materials. Resistivity measurement on a metal particle is successfully performed using ¿4PP.