首页 > 最新文献

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献

英文 中文
Molecular Muscle based Nano-Electro-Mechanical-Systems (NEMS) 分子肌肉纳米机电系统(NEMS)
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805452
B. K. Juluri, Ajeet Kumar, Yi Liu, T. Ye, Ying-Wei Yang, A. Flood, Lei Fang, J. Stoddart, P. Weiss, T. Huang
Created by a bottom-up approach based on self-assembly and molecular recognition, molecular motors and muscles such as bistable rotaxanes are recognized as promising actuation materials for Micro/Nano Electro-Mechanical-Systems (MEMS/NEMS). In this work, we report a hybrid NEMS actuation device based on electrochemical activation of surface-bound bistable rotaxanes (molecular muscles). This NEMS actuator consists of a micro-cantilever coated with a self-assembled monolayer of redox-active palindromic bistable [3]rotaxane R8+ molecules, and when subjected to oxidizing and reducing electrochemical potential undergoes controllable and reversible bending. This work represents an important step towards the practical realization of artificial molecular muscle based actuators for various NEMS/MEMS applications.
基于自组装和分子识别的自下而上方法,双稳态轮烷等分子马达和肌肉被认为是微/纳米机电系统(MEMS/NEMS)中有前途的驱动材料。在这项工作中,我们报道了一种基于表面结合双稳态轮烷(分子肌肉)的电化学激活的混合NEMS驱动装置。该NEMS执行器由微悬臂组成,微悬臂由自组装的氧化还原活性回文双稳态[3]轮烷R8+分子单层包覆,在氧化还原电化学电位作用下发生可控可逆弯曲。这项工作代表了为各种NEMS/MEMS应用实际实现基于人工分子肌肉的致动器的重要一步。
{"title":"Molecular Muscle based Nano-Electro-Mechanical-Systems (NEMS)","authors":"B. K. Juluri, Ajeet Kumar, Yi Liu, T. Ye, Ying-Wei Yang, A. Flood, Lei Fang, J. Stoddart, P. Weiss, T. Huang","doi":"10.1109/MEMSYS.2009.4805452","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805452","url":null,"abstract":"Created by a bottom-up approach based on self-assembly and molecular recognition, molecular motors and muscles such as bistable rotaxanes are recognized as promising actuation materials for Micro/Nano Electro-Mechanical-Systems (MEMS/NEMS). In this work, we report a hybrid NEMS actuation device based on electrochemical activation of surface-bound bistable rotaxanes (molecular muscles). This NEMS actuator consists of a micro-cantilever coated with a self-assembled monolayer of redox-active palindromic bistable [3]rotaxane R8+ molecules, and when subjected to oxidizing and reducing electrochemical potential undergoes controllable and reversible bending. This work represents an important step towards the practical realization of artificial molecular muscle based actuators for various NEMS/MEMS applications.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"542 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115114472","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS Optical Logic NOR Gate using Integrated Tunable Lasers 集成可调谐激光器的MEMS光逻辑NOR门
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805547
B. Liu, H. Cai, X. Zhang, J. Tamil, Q. Zhang, A. Liu
This paper presents an optical logic NOR gate constructed by two MEMS tunable lasers and a Fabry-Pérot (FP) laser chip. The key idea is that the FP chip is directly controlled by two tunable optical signals via the physical mechanism of injection locking. Compared with other fiber-based gating mechanisms, this logic operation only depends on the optical power without need for accurate phase matching or polarization control. In experiment, the logic NOR function is demonstrated successfully at 100 Mb/s with an extinction ratio of more than 20 dB, and it has a potential to reach higher speed of 10 Gb/s level. The work demonstrates a MEMS single-chip solution for optical logic gates with the advantages of compact footprint, simple optical alignment and easy integration, and may find potential applications in high-speed all-optical communication networks.
本文提出了一种由两个MEMS可调谐激光器和一个FP激光芯片构成的光逻辑NOR门。其核心思想是通过注入锁定的物理机制,由两个可调谐光信号直接控制FP芯片。与其他基于光纤的门控机构相比,这种逻辑操作只依赖于光功率,不需要精确的相位匹配或偏振控制。实验成功验证了该逻辑NOR功能在100mb /s下的消光比大于20db,具有达到10gb /s级的更高速率的潜力。该工作展示了一种用于光逻辑门的MEMS单芯片解决方案,具有占地面积小,光学对准简单,易于集成的优点,可能在高速全光通信网络中找到潜在的应用。
{"title":"MEMS Optical Logic NOR Gate using Integrated Tunable Lasers","authors":"B. Liu, H. Cai, X. Zhang, J. Tamil, Q. Zhang, A. Liu","doi":"10.1109/MEMSYS.2009.4805547","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805547","url":null,"abstract":"This paper presents an optical logic NOR gate constructed by two MEMS tunable lasers and a Fabry-Pérot (FP) laser chip. The key idea is that the FP chip is directly controlled by two tunable optical signals via the physical mechanism of injection locking. Compared with other fiber-based gating mechanisms, this logic operation only depends on the optical power without need for accurate phase matching or polarization control. In experiment, the logic NOR function is demonstrated successfully at 100 Mb/s with an extinction ratio of more than 20 dB, and it has a potential to reach higher speed of 10 Gb/s level. The work demonstrates a MEMS single-chip solution for optical logic gates with the advantages of compact footprint, simple optical alignment and easy integration, and may find potential applications in high-speed all-optical communication networks.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"110 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115726391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A 3-D Microfluidic Combinatorial Cell Culture Array 三维微流控组合细胞培养阵列
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805410
M. Liu, Y. Tai
We present the development of a three-dimensional (3-D), on-glass combinatorial cell culture array chip featured with integrated three-input, eight-output combinatorial mixers and cell culture chambers. The device is designed to simultaneously screen for the effects of multiple compounds and concentrations on cultured cells. Experimentally, we first developed a precise way to characterize the combined compound concentration profile at each chamber with a fluorescence method. We then successfully demonstrated the functionality of the cell assay by culturing neuron cells on this device and screening the ability of three chemicals to attenuate cell death caused by cytotoxic hydrogen peroxide. Based on the same technology, the number of inputs and outputs of the combinatorial mixer can be scaled-up to construct labon-chip devices for performing high-throughput cell-based assay and highly parallel and combinatorial chemical or biochemical reactions with reduced labors, reagents, and time.
我们提出了一个三维(3-D),玻璃上组合细胞培养阵列芯片的特点是集成的三输入,八输出组合混合器和细胞培养室。该装置设计用于同时筛选多种化合物和浓度对培养细胞的影响。实验上,我们首先开发了一种精确的方法来表征每个腔室的组合化合物浓度谱。然后,我们通过在该设备上培养神经元细胞并筛选三种化学物质减轻细胞毒性过氧化氢引起的细胞死亡的能力,成功地证明了细胞测定的功能。基于相同的技术,组合混合器的输入和输出数量可以按比例增加,以构建人工芯片设备,用于执行高通量基于细胞的分析和高度平行和组合的化学或生化反应,减少人工,试剂和时间。
{"title":"A 3-D Microfluidic Combinatorial Cell Culture Array","authors":"M. Liu, Y. Tai","doi":"10.1109/MEMSYS.2009.4805410","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805410","url":null,"abstract":"We present the development of a three-dimensional (3-D), on-glass combinatorial cell culture array chip featured with integrated three-input, eight-output combinatorial mixers and cell culture chambers. The device is designed to simultaneously screen for the effects of multiple compounds and concentrations on cultured cells. Experimentally, we first developed a precise way to characterize the combined compound concentration profile at each chamber with a fluorescence method. We then successfully demonstrated the functionality of the cell assay by culturing neuron cells on this device and screening the ability of three chemicals to attenuate cell death caused by cytotoxic hydrogen peroxide. Based on the same technology, the number of inputs and outputs of the combinatorial mixer can be scaled-up to construct labon-chip devices for performing high-throughput cell-based assay and highly parallel and combinatorial chemical or biochemical reactions with reduced labors, reagents, and time.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124459991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Development of New Biochemical IC Chip-Set for Real-Time PCR 新型实时PCR生化IC芯片组的研制
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805390
K. Ikuta, Toshio Sasao, Y. Okuda, Kenji Watamura, M. Ikeuchi
We have developed new biochemical IC chip-set which realizes real-time PCR in the finger top size. Unlike conventional ¿-TAS approach, our chip-set has great versatility and portability since all chips are designed in standardized micro-architecture and the fabrication process can be combined with conventional MEMS processes. Combining this chip-set with existing Biochemical IC chip-set family, researchers can easily develop order-made palm-top system for proteomics research, on-site diagnosis, and tailor-made medicine.
我们开发了新的生化IC芯片组,实现了手指大小的实时PCR。与传统的¿-TAS方法不同,我们的芯片组具有很强的多功能性和可移植性,因为所有芯片都是在标准化的微架构中设计的,并且制造过程可以与传统的MEMS工艺相结合。将该芯片组与现有的生化IC芯片组家族相结合,研究人员可以轻松开发用于蛋白质组学研究,现场诊断和量身定制药物的订制掌上系统。
{"title":"Development of New Biochemical IC Chip-Set for Real-Time PCR","authors":"K. Ikuta, Toshio Sasao, Y. Okuda, Kenji Watamura, M. Ikeuchi","doi":"10.1109/MEMSYS.2009.4805390","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805390","url":null,"abstract":"We have developed new biochemical IC chip-set which realizes real-time PCR in the finger top size. Unlike conventional ¿-TAS approach, our chip-set has great versatility and portability since all chips are designed in standardized micro-architecture and the fabrication process can be combined with conventional MEMS processes. Combining this chip-set with existing Biochemical IC chip-set family, researchers can easily develop order-made palm-top system for proteomics research, on-site diagnosis, and tailor-made medicine.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124286623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrohydrodynamic Jet Printing Capable of Removing Substrate Effects and Modulating Printing Characteristics 能够消除承印物影响和调节印刷特性的电流体动力喷射印刷
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805425
Jun-sung Lee, Youngjae Kim, B. Kang, Sang-Yoon Kim, Jaehong Park, Jungho Hwang, Yong-Jun Kim
Electrohydrodynamic jet printing (EHDP) technique is widely used for the direct writing. However, in the existing EHDP method, the printing characteristics are affected by the printing substrate used, and the printed line width is determined by the geometry of the nozzle. We propose an EHDP method which is capable of (1) removing the effect from the substrate, and (2) controlling the line width through the ON/OFF control of the each nozzle in the nozzle array. Printing characteristics of our EHDP system were examined and successful ON/OFF control of the nozzle array were demonstrated. By using the proposed EHDP, it is expected that stable meniscus regardless of the effect from substrate and different line widths even using the same nozzle can be achieved.
电液喷射打印技术在直接书写中得到了广泛的应用。然而,在现有的EHDP方法中,印刷特性受所使用的印刷基材的影响,印刷线宽由喷嘴的几何形状决定。我们提出了一种EHDP方法,它能够(1)消除基板上的影响,(2)通过喷嘴阵列中每个喷嘴的ON/OFF控制线宽。测试了EHDP系统的打印特性,并成功地实现了喷嘴阵列的开/关控制。通过使用所提出的EHDP,即使使用相同的喷嘴,也可以实现稳定的半月板,而不受基材和不同线宽的影响。
{"title":"Electrohydrodynamic Jet Printing Capable of Removing Substrate Effects and Modulating Printing Characteristics","authors":"Jun-sung Lee, Youngjae Kim, B. Kang, Sang-Yoon Kim, Jaehong Park, Jungho Hwang, Yong-Jun Kim","doi":"10.1109/MEMSYS.2009.4805425","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805425","url":null,"abstract":"Electrohydrodynamic jet printing (EHDP) technique is widely used for the direct writing. However, in the existing EHDP method, the printing characteristics are affected by the printing substrate used, and the printed line width is determined by the geometry of the nozzle. We propose an EHDP method which is capable of (1) removing the effect from the substrate, and (2) controlling the line width through the ON/OFF control of the each nozzle in the nozzle array. Printing characteristics of our EHDP system were examined and successful ON/OFF control of the nozzle array were demonstrated. By using the proposed EHDP, it is expected that stable meniscus regardless of the effect from substrate and different line widths even using the same nozzle can be achieved.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116973926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A Flexible Regeneration Microelectrode with Cell-Growth Guidance 具有细胞生长引导的柔性再生微电极
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805367
R. Gojo, N. Kotake, Takafumi Suzuki, K. Mabuchi, S. Takeuchi
In this study we fabricate a cell-guide on a thin disc-shaped probe with numerous microholes to be implanted between the severed stumps of axons; the cell-guide directs the regenerating axons though the holes in our probe (Fig. 1(a)). Since cell growth is greatly influenced by the topography of the substrate [1-3] we design a SU8 microfluidic cell-guide with a particular shape (Fig. 1(b)) to prevent the random spreading of cells by directing cell growth through the holes. This guide may reduce the chance of short-circuits of the probe by cells that span two different electrodes. Furthermore, as the cells are directed to grow through the holes, we can measure their electrical potential with gold electrodes that we micro-fabricate.
在这项研究中,我们在一个薄的圆盘状探针上制造了一个细胞向导,该探针带有许多微孔,将被植入轴突断端之间;细胞向导通过探针上的孔引导再生轴突(图1(a))。由于细胞生长很大程度上受衬底地形的影响[1-3],我们设计了一种具有特定形状的SU8微流体细胞导管(图1(b)),通过引导细胞通过孔生长来防止细胞的随机扩散。该指南可以减少跨越两个不同电极的电池导致探头短路的机会。此外,当细胞被引导通过孔生长时,我们可以用我们微制造的金电极测量它们的电位。
{"title":"A Flexible Regeneration Microelectrode with Cell-Growth Guidance","authors":"R. Gojo, N. Kotake, Takafumi Suzuki, K. Mabuchi, S. Takeuchi","doi":"10.1109/MEMSYS.2009.4805367","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805367","url":null,"abstract":"In this study we fabricate a cell-guide on a thin disc-shaped probe with numerous microholes to be implanted between the severed stumps of axons; the cell-guide directs the regenerating axons though the holes in our probe (Fig. 1(a)). Since cell growth is greatly influenced by the topography of the substrate [1-3] we design a SU8 microfluidic cell-guide with a particular shape (Fig. 1(b)) to prevent the random spreading of cells by directing cell growth through the holes. This guide may reduce the chance of short-circuits of the probe by cells that span two different electrodes. Furthermore, as the cells are directed to grow through the holes, we can measure their electrical potential with gold electrodes that we micro-fabricate.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117268435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Micro Liquid Prism 微液棱镜
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805546
Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama
This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400¿m in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.
本文介绍了一种微型液体棱镜。两个扁平的透明板漂浮在液滴上,这些板充当棱镜的表面。两个印版通过表面张力自动定位,只需将印版放在椭球状液滴上即可。因此,所提出的棱镜可以毫无困难地在微观尺度上精确制造。由于液体和板被聚二甲苯包裹,棱镜可以保持其形状。制备了面径为400 μ m,整体尺寸小于1mm3的棱镜。验证了所制备的棱镜在表面等离子体共振(SPR)测量中的良好性能。
{"title":"Micro Liquid Prism","authors":"Y. Yoshihata, A. Takei, N. Binh-Khiem, T. Kan, E. Iwase, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2009.4805546","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805546","url":null,"abstract":"This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400¿m in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127079456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation 具有角取向的毫米级元件的零件到零件和零件到衬底的磁性自组装
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805471
S. B. Shetye, I. Eskinazi, David P. Arnold
This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm × 1mm × 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 - 240 s.
本文介绍了利用集成在元件表面的永磁体之间的磁力实现毫米级元件的多功能自组装。通过在液体环境中批量组装自由浮动的1mm × 1mm × 0.5mm硅部件来演示零件到零件的组装,组装成品率从88%到90%不等。通过在干燥环境下在衬底上组装有序阵列来演示零件到衬底的组装,组装成品率从87%到98%不等。在这两种情况下,使用不同的磁性形状/模式来控制组件的对准和角方向,装配时间范围为15 - 240秒。
{"title":"Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation","authors":"S. B. Shetye, I. Eskinazi, David P. Arnold","doi":"10.1109/MEMSYS.2009.4805471","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805471","url":null,"abstract":"This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1mm × 1mm × 0.5mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 - 240 s.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125025913","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A Novel Telescope with Micromirror for Observation of Transient Luminous Events from Space 一种用于空间瞬变发光事件观测的新型微镜望远镜
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805550
J. H. Park, S. Nam, G. Garipov, J. Jeon, J. Y. Jin, B. Khrenov, J. Kim, M. Kim, Y. Kim, J. Lee, G. Na, I. H. Park, Y. Park, B. Yoo
A novel type of telescope, a pinhole-like camera with a micromirror array, is introduced for space observation of Transient Luminous Events (TLEs) like gigantic lightning occurring at upper atmosphere currently under question or investigation. The presented telescope has a unique feature of wide field of view (FOV) of surveillance, fast zoom-in and tracking. A high-fill factor, two-axis rotational micromirror array is proposed for the key component of the telescope. To obtain a large static deflection of a mirror, the self-aligned vertical comb-drive actuator is used. Multi-layered structures of a micromirror are fabricated using bulk micromachining techniques, such as deep reactive ion etching and wafer bonding on the full wafer-scale.
摘要介绍了一种新型望远镜——微镜阵列针孔相机,用于空间观测高层大气中发生的巨大闪电等瞬态发光事件,目前正在研究中。该望远镜具有大视场监视、快速变焦和跟踪等特点。针对望远镜的关键部件,提出了一种高填充系数的双轴旋转微镜阵列。为了获得大的镜面静态偏转,采用了自对准垂直梳状驱动作动器。在全晶圆尺度上,采用深度反应离子刻蚀和晶圆键合等大块微加工技术制备了微镜的多层结构。
{"title":"A Novel Telescope with Micromirror for Observation of Transient Luminous Events from Space","authors":"J. H. Park, S. Nam, G. Garipov, J. Jeon, J. Y. Jin, B. Khrenov, J. Kim, M. Kim, Y. Kim, J. Lee, G. Na, I. H. Park, Y. Park, B. Yoo","doi":"10.1109/MEMSYS.2009.4805550","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805550","url":null,"abstract":"A novel type of telescope, a pinhole-like camera with a micromirror array, is introduced for space observation of Transient Luminous Events (TLEs) like gigantic lightning occurring at upper atmosphere currently under question or investigation. The presented telescope has a unique feature of wide field of view (FOV) of surveillance, fast zoom-in and tracking. A high-fill factor, two-axis rotational micromirror array is proposed for the key component of the telescope. To obtain a large static deflection of a mirror, the self-aligned vertical comb-drive actuator is used. Multi-layered structures of a micromirror are fabricated using bulk micromachining techniques, such as deep reactive ion etching and wafer bonding on the full wafer-scale.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126115232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components 微机械元件面内位移光学测量标定标准的研制
Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805305
J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul
The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.
这项工作的目标是为MEMS生产和表征中使用的光学系统的校准提供平面位移光学测量的小型化参考标准。提出的器件由基于soi的平面微致动器组成。通过频闪照明、激光偏转法和数字散斑干涉测量等光学技术测量了机械和静电驱动引起的位移。
{"title":"Development of Calibration Standards for the Optical Measurement of In-Plane Displacements of Micromechanical Components","authors":"J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul","doi":"10.1109/MEMSYS.2009.4805305","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805305","url":null,"abstract":"The goal of this work is to develop miniaturized reference standards for the optical measurement of inplane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based inplane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured by means of optical techniques such as stroboscopic illumination, laser-deflection method and digital speckle interferometry.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125374734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
期刊
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1