Y. Mei, G. Siu, R. Fu, P. Chu, J. Zhai, Y.J. Wang, O. Tsui, Z. Tang, J.J. Shi, M. Kong
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引用次数: 0
Abstract
A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.
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