Awani Khodkumbhe, Mohd. Nahid, V. Saini, A. Agarwal, R. Prajesh
{"title":"Metal Oxide Semiconductor-based gas sensor for Acetone sensing","authors":"Awani Khodkumbhe, Mohd. Nahid, V. Saini, A. Agarwal, R. Prajesh","doi":"10.1109/NANOTECH.2018.8653573","DOIUrl":null,"url":null,"abstract":"Acetone constitutes 58% of the volatile organic compounds found in human breath. Acetone in breath is proven to be a biomarker for type I diabetes. Portable and sensitive metal oxide semiconductor-based gas sensor with Tungsten Oxide (WO3) thin film as the sensing layer has been used to measure the concentration of Acetone in breath. Acetone gas being a reducing gas decreases the resistance of thin film when it comes in contact of the sensor. The gas sensor is fabricated, characterized and tested for various concentrations of Acetone gas. A linear calibration curve is obtained on the log scale for predicting any concentration in the novel range of 10 ppm to 300 ppm at 300 °C in the sensor fabricated using RF Magnetron sputtering method. The gas sensor is portable and easy to handle with the chip size of 5mm × 5mm and thin film thickness of 100 nm. The efficiency is optimized by operating it at temperature 300 °C with minimum response time and recovery time","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Nanotechnology Symposium (ANTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANOTECH.2018.8653573","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Acetone constitutes 58% of the volatile organic compounds found in human breath. Acetone in breath is proven to be a biomarker for type I diabetes. Portable and sensitive metal oxide semiconductor-based gas sensor with Tungsten Oxide (WO3) thin film as the sensing layer has been used to measure the concentration of Acetone in breath. Acetone gas being a reducing gas decreases the resistance of thin film when it comes in contact of the sensor. The gas sensor is fabricated, characterized and tested for various concentrations of Acetone gas. A linear calibration curve is obtained on the log scale for predicting any concentration in the novel range of 10 ppm to 300 ppm at 300 °C in the sensor fabricated using RF Magnetron sputtering method. The gas sensor is portable and easy to handle with the chip size of 5mm × 5mm and thin film thickness of 100 nm. The efficiency is optimized by operating it at temperature 300 °C with minimum response time and recovery time
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