首页 > 最新文献

2018 IEEE Nanotechnology Symposium (ANTS)最新文献

英文 中文
The Resistivity Size Effect in Epitaxial Ru(0001) and Co(0001) Layers 外延Ru(0001)和Co(0001)层的电阻率尺寸效应
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653560
E. Milosevic, S. Kerdsongpanya, D. Gall
Ru(0001) and Co(0001) films with thickness d ranging from 5 to 300 nm are sputter deposited onto Al2O3(0001) substrates in order to quantify and compare the resistivity size effect. Both metals form epitaxial single crystal layers with their basal planes parallel to the substrate surface and exhibit a root-mean-square roughness < 0.4 nm for Ru and < 0.9 nm for Co. Transport measurements on these layers have negligible resistance contributions from roughness and grain boundary scattering which allows direct quantification of electron surface scattering. The measured resistivity ρ vs d is well described by the classical Fuchs-Sondheimer model, indicating a mean free path for transport within the basal plane of λ = 6.7 ± 0.3 nm for Ru and λ = 19.5 ± 1.0 nm for Co. Bulk Ru is 36% more resistive than Co; in contrast, Ru(0001) layers with d ≤ 25 nm are more conductive than Co(0001) layers, which is attributed to the shorter λ for Ru. The determined λ-values are utilized in combination with the Fuchs-Sondheimer and Mayadas-Shatzkes models to predict and compare the resistance of polycrystalline interconnect lines, assuming a grain boundary reflection coefficient R = 0.4 and accounting for the thinner barrier/adhesion layers available to Ru and Co metallizations. This results in predicted 10 nm half-pitch line resistances for Ru, Co, and Cu of 1.0, 2.2, and 2.1 kΩ/μm, respectively.
为了量化和比较电阻率尺寸效应,将厚度为5 ~ 300nm的Ru(0001)和Co(0001)薄膜溅射沉积在Al2O3(0001)衬底上。两种金属形成外延单晶层,其基底面平行于衬底表面,Ru和Co的均方根粗糙度< 0.4 nm和< 0.9 nm。在这些层上的输运测量可以忽略粗糙度和晶界散射的电阻贡献,从而可以直接量化电子表面散射。测量到的电阻率ρ vs d用经典的Fuchs-Sondheimer模型很好地描述了,表明Ru和Co在基面上的平均自由输运路径分别为λ = 6.7±0.3 nm和λ = 19.5±1.0 nm。大块Ru的电阻率比Co高36%;相比之下,d≤25 nm的Ru(0001)层比Co(0001)层的导电性更好,这是由于Ru的λ更短。将测定的λ值与Fuchs-Sondheimer和Mayadas-Shatzkes模型结合使用,假设晶界反射系数R = 0.4,并考虑到Ru和Co金属化可用的更薄的屏障/粘附层,来预测和比较多晶互连线的电阻。结果预测Ru、Co和Cu的10 nm半间距线电阻分别为1.0、2.2和2.1 kΩ/μm。
{"title":"The Resistivity Size Effect in Epitaxial Ru(0001) and Co(0001) Layers","authors":"E. Milosevic, S. Kerdsongpanya, D. Gall","doi":"10.1109/NANOTECH.2018.8653560","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653560","url":null,"abstract":"Ru(0001) and Co(0001) films with thickness d ranging from 5 to 300 nm are sputter deposited onto Al2O3(0001) substrates in order to quantify and compare the resistivity size effect. Both metals form epitaxial single crystal layers with their basal planes parallel to the substrate surface and exhibit a root-mean-square roughness < 0.4 nm for Ru and < 0.9 nm for Co. Transport measurements on these layers have negligible resistance contributions from roughness and grain boundary scattering which allows direct quantification of electron surface scattering. The measured resistivity ρ vs d is well described by the classical Fuchs-Sondheimer model, indicating a mean free path for transport within the basal plane of λ = 6.7 ± 0.3 nm for Ru and λ = 19.5 ± 1.0 nm for Co. Bulk Ru is 36% more resistive than Co; in contrast, Ru(0001) layers with d ≤ 25 nm are more conductive than Co(0001) layers, which is attributed to the shorter λ for Ru. The determined λ-values are utilized in combination with the Fuchs-Sondheimer and Mayadas-Shatzkes models to predict and compare the resistance of polycrystalline interconnect lines, assuming a grain boundary reflection coefficient R = 0.4 and accounting for the thinner barrier/adhesion layers available to Ru and Co metallizations. This results in predicted 10 nm half-pitch line resistances for Ru, Co, and Cu of 1.0, 2.2, and 2.1 kΩ/μm, respectively.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129943868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Reactively Sputtered Zn(O,S) Buffer Layer Suitable for Roll-to-Roll Fabrication of Cu(In,Ga)Se2 Devices 适用于卷对卷制备Cu(In,Ga)Se2器件的反应溅射Zn(O,S)缓冲层
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653574
Graeme Housser, H. Efstathiadis
One promising pathway to lower the dollar-per-watt ($/W) cost of CIGS PV is by transitioning the entire device fabrication process to high-throughput roll-to-roll (R2R) or sheet-to-sheet manufacturing. For the full realization of this goal, it is essential that each layer and process in the CIGS stack be optimized for throughput, uniformity, and low-cost operation and maintenance. In this work, Zn(O,S) films are deposited by RF reactive magnetron sputtering for evaluation as an R2R-suitable alternative buffer layer and compared to the industry standard CdS buffer layer deposited by chemical bath. ZnOS films are grown under a range of conditions and characterized by AES, UV-Vis, and XRD. A set of 35 10 cm × 10 cm 3-stage co-evaporated CIGS layers were grown on Mo coated soda lime glass (SLG) and split in half, with one half receiving a sputtered Zn(O,S) buffer layer, and the other half a baseline CdS deposited by chemical bath and a sputtered intrinsic ZnO (i-ZnO) bilayer. The devices were completed with Al:ZnO and Ni/Al grids, with no antireflective coating, then mechanically scribed to isolate 0.43 cm2 area sized cells. Analysis of the completed devices includes IV testing under simulated AM1.5 irradiance. Shunt resistance and series resistance are approximated based on IV curve data. The highest efficiency Zn(O,S) based device measured 10.0% while its control pair measured 12.8% with a CdS/i-ZnO bilayer.
降低CIGS PV每瓦成本($/W)的一个有希望的途径是将整个器件制造过程过渡到高通量卷对卷(R2R)或片对片制造。为了充分实现这一目标,必须优化CIGS堆栈中的每一层和工艺,以实现吞吐量、均匀性和低成本的操作和维护。本文采用射频反应磁控溅射法制备Zn(O,S)薄膜,并与工业标准的化学镀液法制备的CdS缓冲层进行了比较。采用AES、UV-Vis和XRD对zno薄膜进行了表征。在Mo涂层的钠石灰玻璃(SLG)上生长了一组35个10 cm × 10 cm的三段式共蒸发CIGS层,并将其分成两半,其中一半是溅射Zn(O,S)缓冲层,另一半是化学浴沉积的基准CdS和溅射本质ZnO (i-ZnO)双分子层。该器件由Al:ZnO和Ni/Al栅格完成,没有抗反射涂层,然后机械刻蚀以隔离0.43 cm2面积大小的电池。完成的器件分析包括模拟AM1.5辐照度下的IV测试。并联电阻和串联电阻根据IV曲线数据进行近似。在CdS/i-ZnO双分子层中,Zn(O,S)基器件的最高效率为10.0%,而其控制对的最高效率为12.8%。
{"title":"Reactively Sputtered Zn(O,S) Buffer Layer Suitable for Roll-to-Roll Fabrication of Cu(In,Ga)Se2 Devices","authors":"Graeme Housser, H. Efstathiadis","doi":"10.1109/NANOTECH.2018.8653574","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653574","url":null,"abstract":"One promising pathway to lower the dollar-per-watt ($/W) cost of CIGS PV is by transitioning the entire device fabrication process to high-throughput roll-to-roll (R2R) or sheet-to-sheet manufacturing. For the full realization of this goal, it is essential that each layer and process in the CIGS stack be optimized for throughput, uniformity, and low-cost operation and maintenance. In this work, Zn(O,S) films are deposited by RF reactive magnetron sputtering for evaluation as an R2R-suitable alternative buffer layer and compared to the industry standard CdS buffer layer deposited by chemical bath. ZnOS films are grown under a range of conditions and characterized by AES, UV-Vis, and XRD. A set of 35 10 cm × 10 cm 3-stage co-evaporated CIGS layers were grown on Mo coated soda lime glass (SLG) and split in half, with one half receiving a sputtered Zn(O,S) buffer layer, and the other half a baseline CdS deposited by chemical bath and a sputtered intrinsic ZnO (i-ZnO) bilayer. The devices were completed with Al:ZnO and Ni/Al grids, with no antireflective coating, then mechanically scribed to isolate 0.43 cm2 area sized cells. Analysis of the completed devices includes IV testing under simulated AM1.5 irradiance. Shunt resistance and series resistance are approximated based on IV curve data. The highest efficiency Zn(O,S) based device measured 10.0% while its control pair measured 12.8% with a CdS/i-ZnO bilayer.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"462 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117016710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dimensionality Reduction of the Complete Bipartite Graph with K Edges Removed for Quantum Walks 量子行走中去K边完全二部图的降维
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653572
Viktoria Koscinski, Chen-Fu Chiang
Systematic dimensionality reduction allows for the optimization of quantum search and transport problems on particular graphs. In the past, the Lanczos Algorithm has been used to perform systematic dimensionality reduction on matrices of graphs including the Complete Graph (CG), the CG with symmetry broken, and Complete Multipartite Graphs (CMPGs), including the Complete Bipartite Graph (CBG). We focus on expanding the scope of these reductions to the CBG with symmetry broken in order to allow the optimization of Quantum Walks on this type of graph.We show that similarly to the CG, the Lanczos Algorithm can be expanded to the CBG with broken symmetry, which has k random edges removed with the constraints that no more than one edge per node is removed and that no edges that connect to the solution node are removed. Unlike the CG with broken edges, which, after reduction, has 3 types of nodes and a resulting 3×3 matrix, the CBG with broken edges reduces to a graph with 5 types of nodes, resulting in a reduction from an NxN matrix to a 5×5 matrix. From these results, it may be further explored whether or not the more general CMPG reduction may also be expanded by breaking the graph’s symmetry, and if so, how the dimensions of the reduced matrices will be affected as the number of partitions grows.
系统的降维允许在特定图上优化量子搜索和传输问题。在过去,Lanczos算法已经被用于对图的矩阵进行系统的降维,包括完全图(CG)、对称破缺的CG和完全多部图(cmpg),包括完全二部图(CBG)。我们专注于将这些约简的范围扩展到对称破缺的CBG,以便在这种类型的图上优化量子行走。我们表明,与CG类似,Lanczos算法可以扩展到具有破对称的CBG,其中有k个随机边被删除,每个节点不超过一条边被删除,并且没有连接到解节点的边被删除。与边缘破碎的CG不同,边缘破碎的CG经过约简后有3种类型的节点和一个3×3矩阵,而边缘破碎的CBG则约简为一个有5种类型节点的图,从而从NxN矩阵约简为5×5矩阵。从这些结果中,可以进一步探索是否更一般的CMPG约简也可以通过打破图的对称性来扩展,如果是这样,那么随着分区数量的增加,约简矩阵的维数将如何受到影响。
{"title":"Dimensionality Reduction of the Complete Bipartite Graph with K Edges Removed for Quantum Walks","authors":"Viktoria Koscinski, Chen-Fu Chiang","doi":"10.1109/NANOTECH.2018.8653572","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653572","url":null,"abstract":"Systematic dimensionality reduction allows for the optimization of quantum search and transport problems on particular graphs. In the past, the Lanczos Algorithm has been used to perform systematic dimensionality reduction on matrices of graphs including the Complete Graph (CG), the CG with symmetry broken, and Complete Multipartite Graphs (CMPGs), including the Complete Bipartite Graph (CBG). We focus on expanding the scope of these reductions to the CBG with symmetry broken in order to allow the optimization of Quantum Walks on this type of graph.We show that similarly to the CG, the Lanczos Algorithm can be expanded to the CBG with broken symmetry, which has k random edges removed with the constraints that no more than one edge per node is removed and that no edges that connect to the solution node are removed. Unlike the CG with broken edges, which, after reduction, has 3 types of nodes and a resulting 3×3 matrix, the CBG with broken edges reduces to a graph with 5 types of nodes, resulting in a reduction from an NxN matrix to a 5×5 matrix. From these results, it may be further explored whether or not the more general CMPG reduction may also be expanded by breaking the graph’s symmetry, and if so, how the dimensions of the reduced matrices will be affected as the number of partitions grows.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129373586","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Investigation of plasmonic based nanocomposite thin films for high temperature gas sensing 等离子体基纳米复合薄膜的高温气敏研究
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653563
L. Banu, R. Potyrailo, M. Carpenter
Plasmonic based thin metal oxide films embedded with Au nanoparticles (AuNPs) have been employed as sensing materials for detection of H2 and CO2 gases at high temperature and an oxygen free environment. Applications of this sensing technology include solid oxide fuel cells (SOFCs) as well as high temperature harsh environments which might be oxidizing or reducing in nature. In situ detection of H2, CO2, CO, CH4, and water vapor at the inlet stream of solid oxide fuel cell is important for its efficient operation. Existing sensors have several prominent limitations such as poor dynamic range, poor stability, slow response time, and inability to accurately detect one or several gases of interest in the presence of numerous interferences and contaminants. Materials with good sensitivity, selectivity and thermal stability for rapid reliable detection and monitoring of gases is still a necessity. In this work, the localized surface plasmon response (LSPR) of AuNPs embedded in metal oxide is investigated for detection of H2 and CO2. Firstly, CeO2 supported AuNP sample is employed for percent level detection of H2 and CO2. The study is extended to H2 sensing in a CO2 / N2 carrier gas as well as CO2 sensing in a H2 / N2 carrier gas. Additionally, H2 pretreatment and increased temperature showed a signature response for CO2 on Au-CeO2 film. These sensors should complement existing instruments in situations when multi-point or distributed measurements are needed and as such sensors with demonstrated stability, selectivity and sensitivity will ensure a series of parallel measurements for enhanced system control.
在高温和无氧环境下,利用嵌有Au纳米粒子的等离子体基金属氧化物薄膜作为传感材料,对H2和CO2气体进行检测。这种传感技术的应用包括固体氧化物燃料电池(sofc)以及高温恶劣的环境,可能是氧化或还原的性质。固体氧化物燃料电池入口流中H2、CO2、CO、CH4和水蒸气的原位检测对其高效运行具有重要意义。现有的传感器有几个突出的局限性,如动态范围差,稳定性差,响应时间慢,以及在存在大量干扰和污染物的情况下无法准确检测一种或几种感兴趣的气体。具有良好灵敏度、选择性和热稳定性的材料对于气体的快速可靠检测和监测仍然是必要的。本文研究了嵌入金属氧化物中的AuNPs的局部表面等离子体响应(LSPR),用于检测H2和CO2。首先,采用CeO2负载的AuNP样品对H2和CO2进行百分比水平检测。将研究扩展到CO2 / N2载气中的H2传感以及H2 / N2载气中的CO2传感。此外,H2预处理和温度升高对Au-CeO2膜上的CO2有显著的响应。在需要多点或分布式测量的情况下,这些传感器应作为现有仪器的补充,因此,具有稳定性、选择性和灵敏度的传感器将确保一系列平行测量,以增强系统控制。
{"title":"Investigation of plasmonic based nanocomposite thin films for high temperature gas sensing","authors":"L. Banu, R. Potyrailo, M. Carpenter","doi":"10.1109/NANOTECH.2018.8653563","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653563","url":null,"abstract":"Plasmonic based thin metal oxide films embedded with Au nanoparticles (AuNPs) have been employed as sensing materials for detection of H<inf>2</inf> and CO<inf>2</inf> gases at high temperature and an oxygen free environment. Applications of this sensing technology include solid oxide fuel cells (SOFCs) as well as high temperature harsh environments which might be oxidizing or reducing in nature. In situ detection of H<inf>2</inf>, CO<inf>2</inf>, CO, CH<inf>4</inf>, and water vapor at the inlet stream of solid oxide fuel cell is important for its efficient operation. Existing sensors have several prominent limitations such as poor dynamic range, poor stability, slow response time, and inability to accurately detect one or several gases of interest in the presence of numerous interferences and contaminants. Materials with good sensitivity, selectivity and thermal stability for rapid reliable detection and monitoring of gases is still a necessity. In this work, the localized surface plasmon response (LSPR) of AuNPs embedded in metal oxide is investigated for detection of H<inf>2</inf> and CO<inf>2</inf>. Firstly, CeO<inf>2</inf> supported AuNP sample is employed for percent level detection of H<inf>2</inf> and CO<inf>2</inf>. The study is extended to H<inf>2</inf> sensing in a CO<inf>2</inf> / N<inf>2</inf> carrier gas as well as CO<inf>2</inf> sensing in a H<inf>2</inf> / N<inf>2</inf> carrier gas. Additionally, H<inf>2</inf> pretreatment and increased temperature showed a signature response for CO<inf>2</inf> on Au-CeO<inf>2</inf> film. These sensors should complement existing instruments in situations when multi-point or distributed measurements are needed and as such sensors with demonstrated stability, selectivity and sensitivity will ensure a series of parallel measurements for enhanced system control.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115780482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Metal Oxide Semiconductor-based gas sensor for Acetone sensing 用于丙酮传感的金属氧化物半导体气体传感器
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653573
Awani Khodkumbhe, Mohd. Nahid, V. Saini, A. Agarwal, R. Prajesh
Acetone constitutes 58% of the volatile organic compounds found in human breath. Acetone in breath is proven to be a biomarker for type I diabetes. Portable and sensitive metal oxide semiconductor-based gas sensor with Tungsten Oxide (WO3) thin film as the sensing layer has been used to measure the concentration of Acetone in breath. Acetone gas being a reducing gas decreases the resistance of thin film when it comes in contact of the sensor. The gas sensor is fabricated, characterized and tested for various concentrations of Acetone gas. A linear calibration curve is obtained on the log scale for predicting any concentration in the novel range of 10 ppm to 300 ppm at 300 °C in the sensor fabricated using RF Magnetron sputtering method. The gas sensor is portable and easy to handle with the chip size of 5mm × 5mm and thin film thickness of 100 nm. The efficiency is optimized by operating it at temperature 300 °C with minimum response time and recovery time
在人类呼吸中发现的挥发性有机化合物中,丙酮占58%。呼吸中的丙酮被证明是I型糖尿病的生物标志物。以氧化钨(WO3)薄膜为传感层的便携式灵敏金属氧化物半导体气体传感器被用于测量呼出气体中丙酮的浓度。丙酮气体是一种还原性气体,当它接触到传感器时,薄膜的电阻会降低。该气体传感器的制作,表征和测试了不同浓度的丙酮气体。采用射频磁控溅射法制作的传感器在300℃下,在10 ppm至300 ppm的新范围内,在对数尺度上获得了线性校准曲线,用于预测任何浓度。该气体传感器便于携带,易于操作,芯片尺寸为5mm × 5mm,薄膜厚度为100nm。通过在300°C的温度下运行,以最小的响应时间和恢复时间来优化效率
{"title":"Metal Oxide Semiconductor-based gas sensor for Acetone sensing","authors":"Awani Khodkumbhe, Mohd. Nahid, V. Saini, A. Agarwal, R. Prajesh","doi":"10.1109/NANOTECH.2018.8653573","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653573","url":null,"abstract":"Acetone constitutes 58% of the volatile organic compounds found in human breath. Acetone in breath is proven to be a biomarker for type I diabetes. Portable and sensitive metal oxide semiconductor-based gas sensor with Tungsten Oxide (WO3) thin film as the sensing layer has been used to measure the concentration of Acetone in breath. Acetone gas being a reducing gas decreases the resistance of thin film when it comes in contact of the sensor. The gas sensor is fabricated, characterized and tested for various concentrations of Acetone gas. A linear calibration curve is obtained on the log scale for predicting any concentration in the novel range of 10 ppm to 300 ppm at 300 °C in the sensor fabricated using RF Magnetron sputtering method. The gas sensor is portable and easy to handle with the chip size of 5mm × 5mm and thin film thickness of 100 nm. The efficiency is optimized by operating it at temperature 300 °C with minimum response time and recovery time","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115710983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
XPS Investigation of the Oxidation State of Different Ceria Powders for CMP Slurry CMP浆料中不同氧化态的XPS研究
Pub Date : 2018-11-01 DOI: 10.1109/nanotech.2018.8653567
C. Netzband, K. Dunn
Ceria nanoparticles are used in chemical mechanical planarization (CMP) slurry for their selective removal of oxides over nitrides. This removal depends on the ratio of Ce3+/Ce4+ ions on the surface of the particles. As this ratio increases, so does the interaction with the oxide surface, resulting in an increased removal rate.Most studies to date focus on how synthesis [1,2] and particle size [3–5] affect these ratios but ignore the changes that could arise when using the particles in an aqueous slurry environment.In this study, X-ray photoelectron spectroscopy (XPS) was used to measure the surface Ce3+ concentration as a function of pH and oxidizing agent concentration [Figures 1&2] in the slurry. The effects of these properties were examined using three different sources for the ceria nanoparticles [Table 1].
二氧化铈纳米颗粒用于化学机械刨平(CMP)浆料中,以选择性去除氮化物之上的氧化物。这种去除率取决于颗粒表面Ce3+/Ce4+离子的比例。随着该比率的增加,与氧化物表面的相互作用也随之增加,从而导致去除率的增加。迄今为止,大多数研究都集中在合成[1,2]和颗粒大小[3-5]如何影响这些比率,而忽略了在水泥浆环境中使用颗粒时可能出现的变化。在本研究中,使用x射线光电子能谱(XPS)测量了浆料中表面Ce3+浓度与pH和氧化剂浓度的关系[图1&2]。研究人员使用三种不同来源的氧化铈纳米颗粒考察了这些特性的影响[表1]。
{"title":"XPS Investigation of the Oxidation State of Different Ceria Powders for CMP Slurry","authors":"C. Netzband, K. Dunn","doi":"10.1109/nanotech.2018.8653567","DOIUrl":"https://doi.org/10.1109/nanotech.2018.8653567","url":null,"abstract":"Ceria nanoparticles are used in chemical mechanical planarization (CMP) slurry for their selective removal of oxides over nitrides. This removal depends on the ratio of Ce3+/Ce4+ ions on the surface of the particles. As this ratio increases, so does the interaction with the oxide surface, resulting in an increased removal rate.Most studies to date focus on how synthesis [1,2] and particle size [3–5] affect these ratios but ignore the changes that could arise when using the particles in an aqueous slurry environment.In this study, X-ray photoelectron spectroscopy (XPS) was used to measure the surface Ce3+ concentration as a function of pH and oxidizing agent concentration [Figures 1&2] in the slurry. The effects of these properties were examined using three different sources for the ceria nanoparticles [Table 1].","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117070158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Memory Technology enabling the next Artificial Intelligence revolution 内存技术实现下一次人工智能革命
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653569
Ranjana Godse, A. McPadden, Vipinchandra Patel, Jung Yoon
Artificial intelligence (AI), specifically Deep Learning (DL) techniques are used for real-time analytics, fraud detection, autonomous driving, and speech recognition etc. These power and data hungry DL applications on cloud and at edge has increased Deep Neural Network (DNN) complexity. Multi-tiered Compute, Memory and Storage arrangements can help push AI applications by providing faster access to high volume of data and optimizing cost. AI memory needs are quite different from traditional workloads, requiring faster access to data. DRAM manufacturers struggle with challenges like density growth, cost and bit errors. High Bandwidth Memory (HBM) and GDDR help achieve almost real time access to the memory. Each of these memories have range of system trade-offs such as density, power efficiency and bandwidth. Unlike traditional memory, Persistent memory like MRAM, Phase change memory (PCM), Resistive RAM (ReRAM), Carbon Nanotube RAM (NRAM) etc. provide non-volatility. Persistent memory has a potential to reduce the latency and cost gap between DRAM and Storage. Persistent Memory is a promising technology for driving AI but face challenges of cost, scaling and reliability. Bigger the training data set, better the inference drawn by DNN. This comes with a huge storage demand. With increase in layer count of 3D NAND and innovations in circuit design and process technology, flash enables multi-bit TLC and QLC densities. PCIe bus with SSD provides low latency and high throughput, making flash the most optimal solution for AI storage. High aspect ratio channel etch, staircase contacts, defect control etc. are some of the challenges with upcoming flash generations.
人工智能(AI),特别是深度学习(DL)技术被用于实时分析、欺诈检测、自动驾驶和语音识别等。这些在云端和边缘的强大和数据密集型深度学习应用增加了深度神经网络(DNN)的复杂性。多层计算、内存和存储安排可以通过提供对大量数据的更快访问和优化成本,帮助推动人工智能应用。人工智能的内存需求与传统的工作负载大不相同,需要更快地访问数据。DRAM制造商面临着密度增长、成本和比特错误等挑战。高带宽内存(HBM)和GDDR有助于实现对内存的几乎实时访问。每一种存储器都有一定范围的系统权衡,如密度、功率效率和带宽。与传统存储器不同,像MRAM、相变存储器(PCM)、电阻式RAM (ReRAM)、碳纳米管RAM (NRAM)等持久存储器提供非易失性。持久内存有可能减少DRAM和存储器之间的延迟和成本差距。持久内存是一项很有前途的人工智能技术,但面临成本、可扩展性和可靠性方面的挑战。训练数据集越大,DNN的推理效果越好。这带来了巨大的存储需求。随着3D NAND层数的增加以及电路设计和工艺技术的创新,闪存可以实现多位TLC和QLC密度。PCIe总线和SSD提供低延迟和高吞吐量,使闪存成为人工智能存储的最佳解决方案。高宽高比通道蚀刻,阶梯接触,缺陷控制等是即将到来的flash一代的一些挑战。
{"title":"Memory Technology enabling the next Artificial Intelligence revolution","authors":"Ranjana Godse, A. McPadden, Vipinchandra Patel, Jung Yoon","doi":"10.1109/NANOTECH.2018.8653569","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653569","url":null,"abstract":"Artificial intelligence (AI), specifically Deep Learning (DL) techniques are used for real-time analytics, fraud detection, autonomous driving, and speech recognition etc. These power and data hungry DL applications on cloud and at edge has increased Deep Neural Network (DNN) complexity. Multi-tiered Compute, Memory and Storage arrangements can help push AI applications by providing faster access to high volume of data and optimizing cost. AI memory needs are quite different from traditional workloads, requiring faster access to data. DRAM manufacturers struggle with challenges like density growth, cost and bit errors. High Bandwidth Memory (HBM) and GDDR help achieve almost real time access to the memory. Each of these memories have range of system trade-offs such as density, power efficiency and bandwidth. Unlike traditional memory, Persistent memory like MRAM, Phase change memory (PCM), Resistive RAM (ReRAM), Carbon Nanotube RAM (NRAM) etc. provide non-volatility. Persistent memory has a potential to reduce the latency and cost gap between DRAM and Storage. Persistent Memory is a promising technology for driving AI but face challenges of cost, scaling and reliability. Bigger the training data set, better the inference drawn by DNN. This comes with a huge storage demand. With increase in layer count of 3D NAND and innovations in circuit design and process technology, flash enables multi-bit TLC and QLC densities. PCIe bus with SSD provides low latency and high throughput, making flash the most optimal solution for AI storage. High aspect ratio channel etch, staircase contacts, defect control etc. are some of the challenges with upcoming flash generations.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"519 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116255109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
[Front matter] (前页)
Pub Date : 2018-11-01 DOI: 10.1109/nanotech.2018.8653575
{"title":"[Front matter]","authors":"","doi":"10.1109/nanotech.2018.8653575","DOIUrl":"https://doi.org/10.1109/nanotech.2018.8653575","url":null,"abstract":"","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124948851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simulation of Quantum Walks via Hamiltonian Reduction 用哈密顿约化法模拟量子行走
Pub Date : 2018-11-01 DOI: 10.1109/NANOTECH.2018.8653568
Aaron Gregory, Chen-Fu Chiang
We utilize dimensionality reduction to model and simulate continuous time quantum walks on a multi-partite graph, verifying that they produce a quadratic speedup over classical walks. We also discuss the applicability of dimensionality reduction as a modelling tool to experiments run on quantum hardware.
我们利用降维来建模和模拟多部图上的连续时间量子行走,验证它们比经典行走产生二次加速。我们还讨论了降维作为一种建模工具在量子硬件上运行的实验中的适用性。
{"title":"Simulation of Quantum Walks via Hamiltonian Reduction","authors":"Aaron Gregory, Chen-Fu Chiang","doi":"10.1109/NANOTECH.2018.8653568","DOIUrl":"https://doi.org/10.1109/NANOTECH.2018.8653568","url":null,"abstract":"We utilize dimensionality reduction to model and simulate continuous time quantum walks on a multi-partite graph, verifying that they produce a quadratic speedup over classical walks. We also discuss the applicability of dimensionality reduction as a modelling tool to experiments run on quantum hardware.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122571232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Characterization of N type Si doped ZnO and ZnO thin films deposited by RF magnetron sputtering N型Si掺杂ZnO及射频磁控溅射制备ZnO薄膜的表征
Pub Date : 2018-11-01 DOI: 10.1109/nanotech.2018.8653571
Jesse Claypoole, Mark Altwerger, Spencer Flottman, H. Efstathiadis
Si doped Zinc oxide (Si-ZnO) thin films were deposited on glass substrates by RF magnetron co-sputtering Phosphorus doped Si and ZnO. The effect of different n-Si/ZnO wattage ratios, pressures, and oxygen percentage in Ar atmosphere on the optical and electrical properties of the films was investigated. A comparison between the Si-ZnO and ZnO thin film deposited under the same conditions was made in order to determine the tradeoff between the resistivity and optical transparency as the wattage ratio of Si/ZnO changed. The best N-Si doped ZnO film achieved a minimum resistivity of 3.06 × 10−3 ohm cm using 2 mT in an argon atmosphere while maintaining greater than 80% transmission in the visible and near infrared spectrum.
采用射频磁控共溅射法在玻璃衬底上制备了掺磷硅和氧化锌(Si-ZnO)薄膜。研究了不同的n-Si/ZnO瓦数比、压力和氩气中氧含量对薄膜光电性能的影响。比较了在相同条件下沉积的Si-ZnO和ZnO薄膜,以确定随着Si/ZnO瓦数比的变化,电阻率和光学透明度之间的权衡。最佳的N-Si掺杂ZnO薄膜在氩气气氛中使用2 mT时,电阻率最小为3.06 × 10−3 ohm cm,且在可见光和近红外光谱中保持80%以上的透射率。
{"title":"Characterization of N type Si doped ZnO and ZnO thin films deposited by RF magnetron sputtering","authors":"Jesse Claypoole, Mark Altwerger, Spencer Flottman, H. Efstathiadis","doi":"10.1109/nanotech.2018.8653571","DOIUrl":"https://doi.org/10.1109/nanotech.2018.8653571","url":null,"abstract":"Si doped Zinc oxide (Si-ZnO) thin films were deposited on glass substrates by RF magnetron co-sputtering Phosphorus doped Si and ZnO. The effect of different n-Si/ZnO wattage ratios, pressures, and oxygen percentage in Ar atmosphere on the optical and electrical properties of the films was investigated. A comparison between the Si-ZnO and ZnO thin film deposited under the same conditions was made in order to determine the tradeoff between the resistivity and optical transparency as the wattage ratio of Si/ZnO changed. The best N-Si doped ZnO film achieved a minimum resistivity of 3.06 × 10−3 ohm cm using 2 mT in an argon atmosphere while maintaining greater than 80% transmission in the visible and near infrared spectrum.","PeriodicalId":292669,"journal":{"name":"2018 IEEE Nanotechnology Symposium (ANTS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120950596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
期刊
2018 IEEE Nanotechnology Symposium (ANTS)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1