{"title":"Microspectrometer: From ideas to product","authors":"H. Herzig, T. Scharf, O. Manzardo","doi":"10.1109/OMEMS.2008.4607827","DOIUrl":null,"url":null,"abstract":"Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607827","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.
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