A Study About Facile Interconnect Formations Involving SB2-JET Solder Ball Stacking and Colonnade Patterning in Hybrid Package Architectures

Matthias Fettke, Timo Kubsch, Vinith Bejugam, Alexander Frick, Andrej Kolbasow, Sergej Walter, T. Teutsch
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Abstract

The current study aims at presenting a cost-effective, facile and novel interconnection approach that employs a unique solder ball jetting process (SB2) for stack formations. Conventional methodologies for bridging boards, chips or filling VIAs can be substituted by a solder ball stacking process. In the SB2 process, a bond-head singulates solder spheres which are then liquefied by laser energy and expelled onto a target using nitrogen pressure. Multiple solder droplets could be dispensed at the same location before subsequent translocation of the bond-head. Continued jetting outlined herein could be used to form single or multiple columns (colonnade), or even fill VIA structures. The challenge is to select a parametric window which prevents disintegration of solder stacks at the interface of boards or chips due to parasitic air inclusions or other factors [1]. The process window for three different stacks of solder spheres with varying diameters and aspect ratios (> > 5) are presented and discussed in this work. This work highlights possible combinations of solder stack configurations regarding the size and number of solder balls per stack and the resulting geometrical characteristics. The metallurgical properties of the solder interface were inspected by cross sectional analysis and X-ray. The mechanical strength and corresponding fracture modes were analyzed with a shear test unit and an optical microscope. The vertical offsets associated with column heights were examined with a 3D profilometer. An FEM simulation was performed, confirming and supplementing the experimental findings. Test vehicles pertaining to board-to-board or chip to chip connections using solder ball stacking are demonstrated. As an evaluation material, Si Chips with AlNiAu metallic pads were populated by SAC_305 (Sn 96.5%, Ag 3.0%, Cu 0.5%) stacked solder ball columns. The chip-to-chip assembly was accomplished additionally using a laser-assisted bonding process (LAB). To demonstrate the wide range of applicability and opportunities for column design, low melting-point solder spheres were placed on the corresponding chip to form a solder interface with the pre-processed columns/stacks during the flip-chip process. The ensuing colonnade hybridswere used to support conventional bonding in standard reflow ovens. Finally, future prospects of intended reliability and stability studies are elucidated as well as the opportunity to use this process technique for filling VIAs.
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基于SB2-JET焊料球堆积和柱状图案的混合封装结构中易于互连的研究
目前的研究旨在提出一种经济、简便、新颖的互连方法,该方法采用独特的焊接球喷射工艺(SB2)来形成堆叠。桥接电路板、芯片或填充过孔的传统方法可以用焊料球堆积工艺代替。在SB2工艺中,一个键头模拟焊接球,然后用激光能量液化焊接球,用氮压将其排出靶上。多个焊锡液滴可以在同一位置被分配,然后再转移粘结头。此处概述的持续喷射可用于形成单个或多个柱(柱廊),甚至填充VIA结构。挑战在于选择一个参数窗口,以防止由于寄生空气夹杂物或其他因素导致电路板或芯片界面上的焊料堆解体。提出并讨论了具有不同直径和长宽比(> > 5)的三种不同焊球堆的工艺窗口。这项工作强调了关于每堆锡球的大小和数量以及由此产生的几何特性的锡堆配置的可能组合。采用横截面分析和x射线检测焊点界面的冶金性能。利用剪切试验装置和光学显微镜对其力学强度和相应的断裂模式进行了分析。用三维轮廓仪检查与柱高度相关的垂直偏移量。进行了有限元模拟,验证和补充了实验结果。演示了与使用焊料球堆叠的板对板或芯片对芯片连接有关的测试车辆。作为评价材料,用SAC_305 (Sn 96.5%, Ag 3.0%, Cu 0.5%)堆积锡球柱填充带有AlNiAu金属衬垫的Si芯片。此外,还使用激光辅助键合工艺(LAB)完成了芯片到芯片的组装。为了证明柱设计的广泛适用性和机会,在倒装过程中,将低熔点焊锡球放置在相应的芯片上,与预处理的柱/堆形成焊锡界面。随后的柱体杂化用于支持标准回流炉中的常规粘合。最后,阐明了未来可靠性和稳定性研究的前景,以及使用该工艺技术填充过孔的机会。
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