Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer

Y. Takei, T. Kan, E. Iwase, Kiyoshi Matsumoto, I. Shimoyama
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Abstract

This paper describes an integration method of bridging-structural single-walled carbon nanotubes (SWNTs) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield (97.8%) and accuracy (position error ≪ 100 nm). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.
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柔性PDMS板上桥接结构单壁碳管的冲压转移集成
本文介绍了一种通过冲压转移将单壁碳纳米管(SWNTs)结构桥接到柔性PDMS片上的集成方法。硅微结构和直接在微结构间隙之间合成的单壁碳纳米管由PDMS冲压片制成,成品率(97.8%)和精度高(位置误差≪100 nm)。通过对转移结构的SEM观察,我们证实了我们的方法可以将桥接结构的碳纳米管转移到柔性材料上,而不会破坏碳纳米管的桥接。
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