Recombination via discrete defect levels with application to semiconductor material characterisation

D. Debuf, R. Corkish
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Abstract

Semiconductor material characterization in terms of defect parameters is presently evaluated experimentally by applying the Shockley-Read-Hall (SRH) recombination time constant expression. A recent analytic solution to the SRH rate equations extended to differential rate equations for two multiple defect level systems, yields a solution derived without an approximation. In terms of material characterisation, this exact solution is shown to provide detailed information on multiple level depths in contrast to the existing theory, which relies on one dominant single level. Furthermore, for semiconductor samples known to be predominantly doped with one defect species, it is shown theoretically that the dominant decay is influenced by the other defect species present in the semiconductor sample.
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通过离散缺陷水平重组与半导体材料表征的应用
目前,利用Shockley-Read-Hall (SRH)复合时间常数表达式对半导体材料的缺陷参数特性进行了实验评价。最近对SRH速率方程的解析解扩展到两个多缺陷水平系统的微分速率方程,得到了一个没有近似的解。在材料表征方面,与现有理论相比,这种精确的解决方案可以提供多个层次深度的详细信息,而现有理论依赖于一个主要的单一层次。此外,对于已知主要掺杂一种缺陷的半导体样品,理论上表明,主要衰减受到半导体样品中存在的其他缺陷的影响。
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