Electrostatic discharge prevention in ultra-pure water spray cleaning aimed at CFM

Abstract

The cleaning processes of the electrical devices with pure water spray have a problem electrostatic discharge (ESD). In this report, the occurrence factors of ESD by measuring the amount of generated electric charge with flying droplets from a single-fluid spray in a Faraday cage have been indicated. Moreover, to prevent ESD, a prototype induction charging element was applied was installed at the position just after the injection. In the case of a straight jet at 5 MPa, generation charge of approximately 30% was suppressed by applying +10 kV of the induction charging element.