D. Girou, B. Landgraf, Ramses Guenther, M. Collon, M. Beijersbergen
{"title":"Bond strength of 3D-stacked monocrystalline silicon X-ray mirrors","authors":"D. Girou, B. Landgraf, Ramses Guenther, M. Collon, M. Beijersbergen","doi":"10.23919/LTB-3D.2017.7947410","DOIUrl":null,"url":null,"abstract":"This paper investigates the bond strength of flat directly-bonded structured monocrystalline silicon X-ray mirrors. We report on the sample manufacturing method and tensile strength testing measurements used to study the influence of annealing.","PeriodicalId":183993,"journal":{"name":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/LTB-3D.2017.7947410","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper investigates the bond strength of flat directly-bonded structured monocrystalline silicon X-ray mirrors. We report on the sample manufacturing method and tensile strength testing measurements used to study the influence of annealing.
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