A reliable Schottky barrier height extraction procedure

Abstract

This work proposes a Schottky barrier extraction procedure which considers the thermionic field emission (TFE) model, image-force induced barrier lowering effect, and parasitic resistance. The accuracy of the Schottky barrier height extracted by the field emission (FE) model at forward bias and the TFE model at reverse bias is evaluated. The TFE model can obtain accurate SBH with low SBH (~0.3 eV) and high doping concentration (~1×l020 cm-3). It is thus recommended that the proposed extraction procedure could be used to study the Schottky junction precisely.