E. Blair, D. Corrigan, I. Schmueser, J. Terry, Stewart Smith, Andrew R. Mount, Anthony J. Walton
{"title":"Test structures to support the development and process verification of microelectrodes for high temperature operation in molten salts","authors":"E. Blair, D. Corrigan, I. Schmueser, J. Terry, Stewart Smith, Andrew R. Mount, Anthony J. Walton","doi":"10.1109/ICMTS.2016.7476198","DOIUrl":null,"url":null,"abstract":"This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.","PeriodicalId":344487,"journal":{"name":"2016 International Conference on Microelectronic Test Structures (ICMTS)","volume":"153 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2016.7476198","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
This paper reports the design and application of test structures used for the development and characterisation of microelectrodes for operation in the harsh, caustic environment of molten salts operating at 450°C. These structures have been employed to evaluate the effect of electrode area and the dielectric integrity of insulating layers in the molten salt. This has been useful in identifying failures mechanisms, which has facilitated the optimisation of both the design and fabrication of the microelectrodes while at the same time also providing valuable information for process verification.
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