{"title":"Throughput Optimization of Fast Processing Tools Using a Dispatching Algorithm","authors":"Shiladitya Chakravorty, Atirek Wribhu","doi":"10.1109/ASMC.2019.8791797","DOIUrl":null,"url":null,"abstract":"Throughput of certain fast processing tool sets in a semiconductor Fab is sometimes constrained by limitations of FOUP delivery system. The delivery system not being able to keep up with the tools result in a certain throughput loss. This throughput loss can be mitigated by staging the WIP close to tools. However, WIP staging has its limitations. This study presents a methodology to overcome these limitations by staging the WIP just in time for dispatching.","PeriodicalId":287541,"journal":{"name":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"44 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2019.8791797","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Throughput of certain fast processing tool sets in a semiconductor Fab is sometimes constrained by limitations of FOUP delivery system. The delivery system not being able to keep up with the tools result in a certain throughput loss. This throughput loss can be mitigated by staging the WIP close to tools. However, WIP staging has its limitations. This study presents a methodology to overcome these limitations by staging the WIP just in time for dispatching.
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