R. D’Esposito, S. Frégonèse, T. Zimmer, A. Chakravorty
{"title":"Dedicated test-structures for investigation of the thermal impact of the BEOL in advanced SiGe HBTs in time and frequency domain","authors":"R. D’Esposito, S. Frégonèse, T. Zimmer, A. Chakravorty","doi":"10.1109/ICMTS.2016.7476168","DOIUrl":null,"url":null,"abstract":"This paper presents a study on the thermal impact of the back-end-of-line (BEOL) in a state-of-the-art SiGe HBT technology for high power applications. A recursive RC network is proposed to model the thermal behavior of the BEOL and is validated with measurements on dedicated test-structures in the time and frequency domain.","PeriodicalId":344487,"journal":{"name":"2016 International Conference on Microelectronic Test Structures (ICMTS)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2016.7476168","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
This paper presents a study on the thermal impact of the back-end-of-line (BEOL) in a state-of-the-art SiGe HBT technology for high power applications. A recursive RC network is proposed to model the thermal behavior of the BEOL and is validated with measurements on dedicated test-structures in the time and frequency domain.
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