S. Hsiao, Chih-Chun Lee, Y. Chiu, Hsi-Fu Shih, J. Chiou, H. Shieh, W. Fang
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引用次数: 0
Abstract
A MEMS batch assembly process for fabricating small form factor optical pickup head is proposed to minimize the complexity of assembly. Electrical and optical components are sealed in a chamber. A silicon optical bench with a packaged laser diode and crystalline-plane mirrors is demonstrated.
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