{"title":"CAD tools for optical MEMS","authors":"J. Gilbert, A. S. Morris","doi":"10.1109/OMEMS.2000.879619","DOIUrl":null,"url":null,"abstract":"As MOEMS transition from the laboratory to production products, a complete design flow is necessary for rapid product development. This paper presents a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879619","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
As MOEMS transition from the laboratory to production products, a complete design flow is necessary for rapid product development. This paper presents a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification.
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