Undoped thin film FD-SOI CMOS with source/drain-to-gate non-overlapped structure for ultra low leak applications

2005 IEEE International SOI Conference Proceedings Pub Date : 2005-12-27 DOI:10.1109/SOI.2005.1563579

N. Miura, Y. Domae, T. Sakata, M. Watanabe, T. Okamura, T. Chiba, K. Fukuda, J. Ida

引用次数: 11

Abstract

In this paper, we present an undoped thin film fully-depleted (FD) silicon-on-insulator (SOI) CMOS with source/drain-to-gate non-overlapped structure for ultra low leak (ULL) transistor. The fabricated device achieved a cutoff frequency f/sub T/ of 65GHz with I/sub off/< 0.1pA//spl mu/m (GIDL-free). The proposed inverted-gate implantation/planar-type SOI is practical and low-cost solution for coin-battery applications.

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无掺杂薄膜FD-SOI CMOS，具有源极漏极非重叠结构，适用于超低泄漏应用

在本文中，我们提出了一种无掺杂薄膜完全耗尽(FD)绝缘体上硅(SOI) CMOS，具有源/漏极到栅非重叠结构，用于超低漏(ULL)晶体管。该器件的截止频率f/sub /为65GHz, I/sub off/< 0.1pA//spl mu/m(无gidl)。所提出的反栅注入/平面型SOI是一种实用且低成本的硬币电池解决方案。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2005 IEEE International SOI Conference Proceedings

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