3D imaging using resonant large-aperture MEMS mirror arrays and laser distance measurement

T. Sandner, M. Wildenhain, T. Klose, H. Schenk, S. Schwarzer, V. Hinkov, H. Hofler, H. Wolfelschneider
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引用次数: 19

Abstract

We present a system concept for a scanning laser radar employing a newly developed MEMS mirror array. The array solution permits large reception apertures while preserving outstanding reliability, high scanning speed, compact size and small system weight. We show first results using a single-mirror prototype.
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利用谐振式大孔径MEMS反射镜阵列和激光测距技术进行三维成像
本文提出了一种基于MEMS反射镜阵列的扫描激光雷达系统概念。阵列解决方案允许大的接收孔径,同时保持出色的可靠性,高扫描速度,紧凑的尺寸和小的系统重量。我们展示了使用单镜原型的第一个结果。
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Optical add/drop filter based on dual curved photonic crystal resonator MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators A varifocal micromirror with pure parabolic surface using bending moment drive Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si
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