Low operation voltage non self-emissive MEMS color filter pixels

C. Lo, J. Hast, Olli‐Heikki Huttunen, J. Petaja, J. Hiitola-Keinanen, A. Maaninen, H. Kopola, H. Fujita, H. Toshiyoshi
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引用次数: 1

Abstract

A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.
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低工作电压非自发射MEMS彩色滤波像素
基于MEMS(微电子机械系统)Fabry-Perot干涉装置的非自发射彩色滤光片像素,通过减小牛顿环的尺寸,实现了50%的工作电压降低。新设计的间隔层空气槽可以有效地排出被困在像素内的空气,从而有效地降低其工作电压。如果气槽面积过大,则会产生跷跷板效应,降低运行电压的效果。
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