Recent topics of micro and nano mechatronics

T. Fukuda, F. Arai, Lixin Dong, Y. Imaizumi
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引用次数: 1

Abstract

This paper focuses on the recent topics of micro and nano mechatronics. A nano laboratory-a prototype nano manufacturing system based on nanorobotlic manipulation-is presented for enabling nanotube-based micro- and nanomechatronics, such as microhano sensors and actuators, bioapplications and nano-robotics applications. Deflection of cantilevered individual nanotubes based mass flow sensors, field emission of a cantilevered nanotube based approaching sensor, dual cantilevered nanotubes based thermal probes, and telescoping motion based nanotube linear bearings and our preliminary works on actuators are reviewed.
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微纳机电一体化最新课题
本文重点介绍了微纳机电一体化的最新研究课题。一个纳米实验室——一个基于纳米机器人操作的原型纳米制造系统——被提出用于实现基于纳米管的微和纳米电子学,如微纳米传感器和致动器,生物应用和纳米机器人应用。综述了基于悬臂式单纳米管的偏转质量流传感器、基于悬臂式纳米管的场发射接近传感器、基于双悬臂式纳米管的热探头和基于伸缩运动的纳米管线性轴承以及我们在执行器方面的初步工作。
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