{"title":"Recent topics of micro and nano mechatronics","authors":"T. Fukuda, F. Arai, Lixin Dong, Y. Imaizumi","doi":"10.1109/ICIMA.2004.1384136","DOIUrl":null,"url":null,"abstract":"This paper focuses on the recent topics of micro and nano mechatronics. A nano laboratory-a prototype nano manufacturing system based on nanorobotlic manipulation-is presented for enabling nanotube-based micro- and nanomechatronics, such as microhano sensors and actuators, bioapplications and nano-robotics applications. Deflection of cantilevered individual nanotubes based mass flow sensors, field emission of a cantilevered nanotube based approaching sensor, dual cantilevered nanotubes based thermal probes, and telescoping motion based nanotube linear bearings and our preliminary works on actuators are reviewed.","PeriodicalId":375056,"journal":{"name":"2004 International Conference on Intelligent Mechatronics and Automation, 2004. Proceedings.","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on Intelligent Mechatronics and Automation, 2004. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIMA.2004.1384136","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper focuses on the recent topics of micro and nano mechatronics. A nano laboratory-a prototype nano manufacturing system based on nanorobotlic manipulation-is presented for enabling nanotube-based micro- and nanomechatronics, such as microhano sensors and actuators, bioapplications and nano-robotics applications. Deflection of cantilevered individual nanotubes based mass flow sensors, field emission of a cantilevered nanotube based approaching sensor, dual cantilevered nanotubes based thermal probes, and telescoping motion based nanotube linear bearings and our preliminary works on actuators are reviewed.