{"title":"Dynamically-balanced folded-beam suspensions","authors":"S. Shmulevich, Inbar Hotzen, D. Elata","doi":"10.1109/MEMSYS.2015.7050925","DOIUrl":null,"url":null,"abstract":"We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"106 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7050925","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.