Pub Date : 2015-07-07DOI: 10.1109/MEMSYS.2015.7050925
S. Shmulevich, Inbar Hotzen, D. Elata
We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.
{"title":"Dynamically-balanced folded-beam suspensions","authors":"S. Shmulevich, Inbar Hotzen, D. Elata","doi":"10.1109/MEMSYS.2015.7050925","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050925","url":null,"abstract":"We present a complete methodology for designing a new folded-beam suspension which responds as a linear spring at the fundamental resonance. This is in sharp contrast to the response of standard folded-beam suspensions. The static response of the standard folded-beam suspension is linear over a wide range of motions. But, surprisingly, the dynamic response of the standard folded-beam suspension is strongly nonlinear for small motion amplitudes that are larger than the width of the flexure beams. We have previously shown experimental evidence of this problem with the standard suspension. In contrast, the stiffness of the new dynamically balanced folded-beam suspension is not affected by motion amplitude. In the present work we show new experimental evidence demonstrating that the new design solves this problem.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117234134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050871
T. Liu, C. Kim
We report that superhydrophobic (SHPo) surfaces based purely on surface structuring shows a robust super-repellency under a prolonged contact with serum droplet as an example of protein-rich biological fluids. In contrast, normal SHPo surfaces, which are based on surface chemistry and surface structuring, lose repellency and eventually get wetted in the same tests. This is the first report of a SHPo surface maintaining super-repellency to a biological fluid.
{"title":"Structure-based superhydrophobicity for serum droplets","authors":"T. Liu, C. Kim","doi":"10.1109/MEMSYS.2015.7050871","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050871","url":null,"abstract":"We report that superhydrophobic (SHPo) surfaces based purely on surface structuring shows a robust super-repellency under a prolonged contact with serum droplet as an example of protein-rich biological fluids. In contrast, normal SHPo surfaces, which are based on surface chemistry and surface structuring, lose repellency and eventually get wetted in the same tests. This is the first report of a SHPo surface maintaining super-repellency to a biological fluid.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123057367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051159
M. Kim, M. K. Kim, H. Ahn, Y. Kim
This paper reports a bidirectional thermoelectric energy generator (TEG) with double type lenses for concentrating solar power. When solar power was applied to the TEG, solar energy is concentrated by PMMA lens firstly. The concentrated energy is absorbed as heat energy through phase-change of phase change material (PCM). And then, the liquid PCM lens focuses energy on the TEG. After removing energy source, the latent heat in PCM is released. Therefore, the proposed TEG generates energy steadily.
{"title":"Bidirectional thermoelectric energy generator based on a phase-change lens for concentrating solar power","authors":"M. Kim, M. K. Kim, H. Ahn, Y. Kim","doi":"10.1109/MEMSYS.2015.7051159","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051159","url":null,"abstract":"This paper reports a bidirectional thermoelectric energy generator (TEG) with double type lenses for concentrating solar power. When solar power was applied to the TEG, solar energy is concentrated by PMMA lens firstly. The concentrated energy is absorbed as heat energy through phase-change of phase change material (PCM). And then, the liquid PCM lens focuses energy on the TEG. After removing energy source, the latent heat in PCM is released. Therefore, the proposed TEG generates energy steadily.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123417625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051060
A. Charalambides, Jian Cheng, Teng Li, S. Bergbreiter
This paper reports the first 3-axis (normal and shear force) all-elastomer capacitive MEMS tactile sensor. A multiphysics finite element model was developed and was used to tailor sensor geometry for high shear force sensitivity. Sensor area was 1.5 × 1.5 mm and used vertical capacitive structures with 20 μm electrode gaps to achieve high shear force sensitivities of 8.8 fF/N, shear force resolutions of 50 mN, and shear range of more than 2000 mN, with a normal force sensitivity of 0.9 fF/N. Fabrication utilized a simple elastomer molding process with reusable DRIE silicon molds for inexpensive manufacturing.
{"title":"3-axis all elastomer MEMS tactile sensor","authors":"A. Charalambides, Jian Cheng, Teng Li, S. Bergbreiter","doi":"10.1109/MEMSYS.2015.7051060","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051060","url":null,"abstract":"This paper reports the first 3-axis (normal and shear force) all-elastomer capacitive MEMS tactile sensor. A multiphysics finite element model was developed and was used to tailor sensor geometry for high shear force sensitivity. Sensor area was 1.5 × 1.5 mm and used vertical capacitive structures with 20 μm electrode gaps to achieve high shear force sensitivities of 8.8 fF/N, shear force resolutions of 50 mN, and shear range of more than 2000 mN, with a normal force sensitivity of 0.9 fF/N. Fabrication utilized a simple elastomer molding process with reusable DRIE silicon molds for inexpensive manufacturing.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125290834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050946
S. Hong, M. Lee, H. Cheon, J. Ahn, M. Kim, T. Kim, D. Cho
This paper presents a new microfabrication method for surface ion traps and experimental results with trapped ions. Fabricating ion trap chips is a very formidable task because the top electrodes are vertically spaced more than 10 μm from the bottom electrodes with an indented dielectric layer in the middle. Previous ion traps were fabricated using TEOS timed etch or tungsten sacrificial etch techniques. This paper presents a new microfabrication method, using copper as a sacrificial material for an aluminum-oxide-aluminum ion trap structure. Using the developed method the overhang dimensions of the top aluminum electrodes can be accurately controlled. Fabricated ion trap chips are installed in a 1 × 10-11 Torr vacuum environment for ion trapping experiments. Successful results in trapping strings of 171Yb+ and 174Yb+ ions as well as manipulating 171Yb+ ions for qubit operation are demonstrated.
{"title":"New scalable microfabrication method for surface ion traps and experimental results with trapped ions","authors":"S. Hong, M. Lee, H. Cheon, J. Ahn, M. Kim, T. Kim, D. Cho","doi":"10.1109/MEMSYS.2015.7050946","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050946","url":null,"abstract":"This paper presents a new microfabrication method for surface ion traps and experimental results with trapped ions. Fabricating ion trap chips is a very formidable task because the top electrodes are vertically spaced more than 10 μm from the bottom electrodes with an indented dielectric layer in the middle. Previous ion traps were fabricated using TEOS timed etch or tungsten sacrificial etch techniques. This paper presents a new microfabrication method, using copper as a sacrificial material for an aluminum-oxide-aluminum ion trap structure. Using the developed method the overhang dimensions of the top aluminum electrodes can be accurately controlled. Fabricated ion trap chips are installed in a 1 × 10-11 Torr vacuum environment for ion trapping experiments. Successful results in trapping strings of 171Yb+ and 174Yb+ ions as well as manipulating 171Yb+ ions for qubit operation are demonstrated.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122682345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051154
L. Minh, M. Hara, H. Kuwano, T. Yokoyama, T. Nishihara, M. Ueda
We report the new doped-AlN thin film, (Mg,Zr)AlN, based micro energy harvester. By co-doping Mg and Zr into AlN crystal, (Mg,Zr)AlN shows giant piezoelectricity and preserves low permittivity. (Mg,Zr)AlN has higher figure of merit (FOM = e312/(ε0ε)) than conventional PZT. The 13 at.%-(Mg,Zr)AlN had the experimental FOM of up to 16.7 GPa. The micromachining harvester provided the high normalized power density of 3.72 mW.g-2.cm-3. This achievement was 1.5-fold increase compared to state of the art.
{"title":"Piezoelectric micro energy harvesters employing advanced (Mg,Zr)-codoped AlN thin film","authors":"L. Minh, M. Hara, H. Kuwano, T. Yokoyama, T. Nishihara, M. Ueda","doi":"10.1109/MEMSYS.2015.7051154","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051154","url":null,"abstract":"We report the new doped-AlN thin film, (Mg,Zr)AlN, based micro energy harvester. By co-doping Mg and Zr into AlN crystal, (Mg,Zr)AlN shows giant piezoelectricity and preserves low permittivity. (Mg,Zr)AlN has higher figure of merit (FOM = e<sub>31</sub><sup>2</sup>/(ε<sub>0</sub>ε)) than conventional PZT. The 13 at.%-(Mg,Zr)AlN had the experimental FOM of up to 16.7 GPa. The micromachining harvester provided the high normalized power density of 3.72 mW.g<sup>-2</sup>.cm<sup>-3</sup>. This achievement was 1.5-fold increase compared to state of the art.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129875455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051022
C. Chu, Wen-Hsin Chang, W. Kao, Chih-Lin Lin, K. Chang, Yu-Lin Wang, Gwo-Bin Lee
Rapid and accurate diagnosis of C-reactive protein (CRP) is crucial for preventing cardiovascular diseases because it is a well-known biomarker for evaluating risks of cardiovascular diseases. Our previous work has shown that a microfluidic system equipped with a field-effect-transistor (FET)-based biosensor could detect CRP in 0.1X PBS and provided a limit of detection (LOD) of 26 pM CRP without gate bias. To improve the LOD, a new microfluidic device with a new methodology for measuring FET-based biosensors is presented in this study. Not only can the proposed system work in a solution with a physiological salt concentration but it also detects CRP with ultra-high sensitivity in an automatic fashion. This is the first time that a FET-based biosensor can effectively and automatically detect CRP in a physiological salt concentration without decreasing the sensitivity. The LOD of CRP using aptamer-immobilized AlGaN/GaN high-electron-mobility transistors (HEMTs) was experimentally found to be 1fM, demonstrating the superior performance of this new technique. It may be used as a point-of-care device for CRP detection in the near future.
{"title":"An integrated microfluidic system with field-effect-transistor-based biosensors for automatic highly-sensitive C-reactive protein measurement","authors":"C. Chu, Wen-Hsin Chang, W. Kao, Chih-Lin Lin, K. Chang, Yu-Lin Wang, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2015.7051022","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051022","url":null,"abstract":"Rapid and accurate diagnosis of C-reactive protein (CRP) is crucial for preventing cardiovascular diseases because it is a well-known biomarker for evaluating risks of cardiovascular diseases. Our previous work has shown that a microfluidic system equipped with a field-effect-transistor (FET)-based biosensor could detect CRP in 0.1X PBS and provided a limit of detection (LOD) of 26 pM CRP without gate bias. To improve the LOD, a new microfluidic device with a new methodology for measuring FET-based biosensors is presented in this study. Not only can the proposed system work in a solution with a physiological salt concentration but it also detects CRP with ultra-high sensitivity in an automatic fashion. This is the first time that a FET-based biosensor can effectively and automatically detect CRP in a physiological salt concentration without decreasing the sensitivity. The LOD of CRP using aptamer-immobilized AlGaN/GaN high-electron-mobility transistors (HEMTs) was experimentally found to be 1fM, demonstrating the superior performance of this new technique. It may be used as a point-of-care device for CRP detection in the near future.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129244473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050897
Lokesh Dhakar, F. Tay, Chengkuo Lee
This paper presents a novel triboelectric nanogenerator (TENG) using outermost layer of human skin i.e. epidermis as an active triboelectric layer for device operation. The device is demonstrated to generate an open circuit voltage of ~90V with mild finger touch. The device uses PDMS nanopillar structures to improve the performance of contact electrification process which causes the charging of two surfaces. The device is demonstrated as a wearable self-powered device which can be used as a motion and activity sensor for a variety of applications.
{"title":"Skin based flexible triboelectric nanogenerators with motion sensing capability","authors":"Lokesh Dhakar, F. Tay, Chengkuo Lee","doi":"10.1109/MEMSYS.2015.7050897","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050897","url":null,"abstract":"This paper presents a novel triboelectric nanogenerator (TENG) using outermost layer of human skin i.e. epidermis as an active triboelectric layer for device operation. The device is demonstrated to generate an open circuit voltage of ~90V with mild finger touch. The device uses PDMS nanopillar structures to improve the performance of contact electrification process which causes the charging of two surfaces. The device is demonstrated as a wearable self-powered device which can be used as a motion and activity sensor for a variety of applications.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121150427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050958
Yang Liu, Jungwoo Park, Tong Xu, Yucheng Xu, Jay Han-Chieh Chang, D. Kang, Xiaoxiao Zhang, A. Goldkorn, Y. Tai
This paper reports a novel Magnesium-embedded cell filter for Circulating Tumor Cell (CTC) capture, release and isolation. The new and novel feature is the use of thin-film Mg to release the captured CTCs based on the fact that any Cl- containing culture medium can readily etch Mg away [1]. The releasing and the isolation of each individual CTC are demonstrated here. After filtration process, the filter is submerged in PBS to facilitate Mg etching. The top PA-C filter pieces break apart from the bottom after Mg completely dissolves, enabling captured CTC cells to detach from the filter. The released CTC can then be easily aspirated into a micropipette, and then for further, such as, DNA mutation analysis.
{"title":"Magnesium-embedded live cell filter for CTC isolation","authors":"Yang Liu, Jungwoo Park, Tong Xu, Yucheng Xu, Jay Han-Chieh Chang, D. Kang, Xiaoxiao Zhang, A. Goldkorn, Y. Tai","doi":"10.1109/MEMSYS.2015.7050958","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050958","url":null,"abstract":"This paper reports a novel Magnesium-embedded cell filter for Circulating Tumor Cell (CTC) capture, release and isolation. The new and novel feature is the use of thin-film Mg to release the captured CTCs based on the fact that any Cl- containing culture medium can readily etch Mg away [1]. The releasing and the isolation of each individual CTC are demonstrated here. After filtration process, the filter is submerged in PBS to facilitate Mg etching. The top PA-C filter pieces break apart from the bottom after Mg completely dissolves, enabling captured CTC cells to detach from the filter. The released CTC can then be easily aspirated into a micropipette, and then for further, such as, DNA mutation analysis.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121166860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050891
T. Koshi, E. Iwase
We developed a self-healing metal wire using an electric field trapping of gold nanoparticles. A cracked metal wire on a stretchable substrate can get its conductivity again by the self-healing function. In this paper, first, we theoretically analyzed force acting on a nanoparticle and calculated a critical voltage which cause the electric field trapping. Next, we fabricated gold wires with artificially patterned cracks on a glass substrate and verified the self-healing function by experiments of a crack healing. Finally, we demonstrated the self-healing of a cracked metal wire on a stretchable substrate to show a usefulness of the self-healing for flexible devices.
{"title":"Self-healing metal wire using an electric field trapping of gold nanoparticles for flexible devices","authors":"T. Koshi, E. Iwase","doi":"10.1109/MEMSYS.2015.7050891","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050891","url":null,"abstract":"We developed a self-healing metal wire using an electric field trapping of gold nanoparticles. A cracked metal wire on a stretchable substrate can get its conductivity again by the self-healing function. In this paper, first, we theoretically analyzed force acting on a nanoparticle and calculated a critical voltage which cause the electric field trapping. Next, we fabricated gold wires with artificially patterned cracks on a glass substrate and verified the self-healing function by experiments of a crack healing. Finally, we demonstrated the self-healing of a cracked metal wire on a stretchable substrate to show a usefulness of the self-healing for flexible devices.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124069668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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