{"title":"Reconsideration of the threshold voltage variability estimated with pair transistor cell array","authors":"K. Terada, N. Higuchi, K. Tsuji","doi":"10.1109/ICMTS.2013.6528155","DOIUrl":null,"url":null,"abstract":"The standard deviation of threshold voltage, σVTH, which is estimated with Pair Transistor cell Array (PTA), is examined using the test chip fabricated by 65-nm technology. It is found that the errors are caused by two problems: 1) the problem in the approximation and 2) leak current in the isolation region. Taking them into account, the application of PTA to the test structure in scribe line is studied.","PeriodicalId":142589,"journal":{"name":"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2013.6528155","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The standard deviation of threshold voltage, σVTH, which is estimated with Pair Transistor cell Array (PTA), is examined using the test chip fabricated by 65-nm technology. It is found that the errors are caused by two problems: 1) the problem in the approximation and 2) leak current in the isolation region. Taking them into account, the application of PTA to the test structure in scribe line is studied.
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