Characterization and model development of CMOS floating gate defect (FGD)

W. Y. Chiew, A. bin A'ain
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引用次数: 1

Abstract

In this paper, a structured development of model and testing strategies for floating gate defect (FGD) are described. It is shown that by using proposed testing strategies, it is possible to reduce defect escapee and easier for defect model migration to different processes. The scopes of work discussed in this paper are focused on characterisation, model development and the detectability of the FGD which usually requires careful and accurate knowledge of the process parameters, including parasitic components of the circuit. The detectability of FGD in scaled down technologies and process variation is examined as well. Simulation results proved that the new developed model is simple yet reliable in FGD detection.
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CMOS浮栅缺陷(FGD)表征及模型开发
本文介绍了浮栅缺陷(FGD)模型的结构化发展和测试策略。结果表明,通过使用所提出的测试策略,可以减少缺陷逃逸,并且更容易将缺陷模型迁移到不同的过程中。本文讨论的工作范围集中在表征、模型开发和FGD的可探测性上,这通常需要对过程参数(包括电路的寄生组件)进行仔细和准确的了解。研究了按比例缩小工艺和工艺变化时烟气脱硫的可探测性。仿真结果表明,该模型在烟气脱硫检测中简单可靠。
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