T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman
{"title":"Micromachined hydraulic astable multivibrator","authors":"T. Lammerink, N. Tas, J. Berenschot, M. Elwenspoek, J. Fluitman","doi":"10.1109/MEMSYS.1995.472561","DOIUrl":null,"url":null,"abstract":"The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"243 2","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"18","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472561","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 18
Abstract
The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.
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