A micromirror scanner with vertical combs tilted by assembly process

Min-Ho Jun, Sungsik Yun, Man-Geun Kim, Sung-Kil Lee, Jong-Hyun Lee
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引用次数: 4

Abstract

We have developed a simple assembly technology to realize the tilted vertical combs for electrostatic micromirror scanners. The in-plane vertical comb electrodes are easily transformed into out-of-plane tilted comb by asymmetrical pushing down the levers of the spring that is attached to the micro mirror. The fabricated mirror scanner showed the optical scan angle of up to 1.3deg at 60 V and the resonant frequency of 3.15 kHz.
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一种装配过程中垂直梳状倾斜的微镜扫描仪
我们开发了一种简单的装配技术来实现静电微镜扫描仪的倾斜垂直梳。通过不对称地下推连接在微镜上的弹簧杠杆,可以很容易地将面内垂直梳状电极转化为面外倾斜梳状电极。所制备的反射式扫描仪在60 V下的光学扫描角可达1.3°,谐振频率为3.15 kHz。
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