E. Atanassova, N. S. Boltovets, E. Kolyadina, R. Konakova, J. Koprinarova, L. Matveeva, V. V. Milenin, V. F. Mitin, V. V. Shynkarenko, D. I. Voitsikhovskyi
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引用次数: 3
Abstract
We present the results of comprehensive investigations of the effects of ordering enhanced by magnetron microwave radiation (frequency of 2.45 GHz, irradiance of 1.5 W/cm/sup 2/, and processing duration of 10 s) in Ta/sub 2/O/sub 5/-p-Si heterosystem and MIS structures with Ta/sub 2/O/sub 5/ insulator 16-24 nm thick. It was shown that using microwave treatment of investigated samples we can receive practically relaxed heterosystems whose parameters correlate with characteristics of MIS structures. In this case the Ta/sub 2/O/sub 5//p-Si interface becomes essentially ordered.
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