{"title":"A test structure to reveal short-range correlation effects of mismatch fluctuations in backend metal fringe capacitors","authors":"H. Tuinhout, A. Z. Duijnhoven, I. Brunets","doi":"10.1109/ICMTS.2018.8383771","DOIUrl":null,"url":null,"abstract":"This paper presents a set of test structures that revealed a thus far unknown (or at least unreported) CMP-related short-range correlated mismatch fluctuation effect on the matching of backend metal fringe capacitors. It is shown that an apparent degradation of mismatch standard deviations at medium-range distances is in fact due to an improvement of matching for devices placed at very small distances.","PeriodicalId":271839,"journal":{"name":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2018.8383771","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a set of test structures that revealed a thus far unknown (or at least unreported) CMP-related short-range correlated mismatch fluctuation effect on the matching of backend metal fringe capacitors. It is shown that an apparent degradation of mismatch standard deviations at medium-range distances is in fact due to an improvement of matching for devices placed at very small distances.
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