3D microelectronic with BEOL compatible devices

D. Drouin, Mohamed Amine-Bounouar, G. Droulers, M. Labalette, M. Pioro-Ladrière, A. Souifi, S. Ecoffey
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引用次数: 1

Abstract

This presentation will address the potential of nanoelectronic devices 3D monolithic integration in the CMOS back-end-of-line (BEOL) to add functionality and enhance integrated circuits (ICs) performances.
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3D微电子与BEOL兼容的设备
本报告将讨论纳米电子器件3D单片集成在CMOS后端线(BEOL)中的潜力,以增加功能和提高集成电路(ic)的性能。
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