Fabrication of monolithic integrated MEMS resonator with wet-release-monitoring array

Abstract

In this work, a monolithic integrated MEMS resonator was fabricated and tested. Surface micromachining method was employed to fabricate the cantilever MEMS resonator after a standard 3 μm CMOS process. The wet release method with dilute HF solution was chosen and compared to the anhydrous HF vapor release process. A release-monitoring structure with polysilicon/Au cantilever array was used to determine the corrosion time of the sacrificial material. Results showed that the MOSFETs function well after proposed release process.