Large-area monolithic photonic crystal mirrors with high reflectivity in the 1250–1650nm band patterned by optical lithography

I. Jung, S.B. Mallick, O. Solgaard
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引用次数: 1

Abstract

This paper describes large area (500 mum - 500 mum) monolithic 2-D photonic crystals (PC) for applications as high-reflectivity, broad-band mirrors in the near-IR (infra-red) spectrum. These large PC mirrors were patterned using an ASM-L i-line stepper to achieve minimum feature sizes of less than 100 nm. The reflectivity spectrum of the mirrors show that the high reflectivity (>90%) bands can be shifted in wavelength by varying the hole sizes of the photonic crystal to cover the 400 nm near-IR band from 1250 nm-1650 nm.
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在1250 ~ 1650nm波段具有高反射率的大面积单片光子晶体镜
本文介绍了大面积(500 μ m ~ 500 μ m)单片二维光子晶体(PC),用于近红外光谱的高反射率、宽带反射镜。这些大型PC反射镜使用ASM-L直线步进器进行图像化,以实现小于100纳米的最小特征尺寸。反射镜的反射率光谱表明,通过改变光子晶体的孔尺寸,高反射率(>90%)波段可以在波长上移位,覆盖1250 nm-1650 nm的400 nm近红外波段。
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