M. Denoual, M. Pouliquen, D. Robbes, J. Grand, H. Awala, S. Mintova, O. de Sagazan, S. Inoue, A. Mita-Tixier, Y. Mita
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引用次数: 3
Abstract
Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed.
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