{"title":"Future trends in local lifetime control [power semiconductor devices]","authors":"J. Vobecký, P. Hazdra","doi":"10.1109/ISPSD.1996.509471","DOIUrl":null,"url":null,"abstract":"Energy and dose mixing concept, applied in ion irradiation technology for local lifetime tailoring, is shown to be capable of creating a customer-specific lifetime profile. The electrical parameters of power diode, subjected to the new ion irradiation concept, are compared with those ones resulting from the energy dispersed alpha particle irradiation.","PeriodicalId":377997,"journal":{"name":"8th International Symposium on Power Semiconductor Devices and ICs. ISPSD '96. Proceedings","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"8th International Symposium on Power Semiconductor Devices and ICs. ISPSD '96. Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISPSD.1996.509471","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
Energy and dose mixing concept, applied in ion irradiation technology for local lifetime tailoring, is shown to be capable of creating a customer-specific lifetime profile. The electrical parameters of power diode, subjected to the new ion irradiation concept, are compared with those ones resulting from the energy dispersed alpha particle irradiation.
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