M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki
{"title":"Thermocouples on trench sidewall in channel fronting on flowing material","authors":"M. Shibata, Takahiro Yamaguchi, S. Kumagai, M. Sasaki","doi":"10.1109/MEMSYS.2015.7051090","DOIUrl":null,"url":null,"abstract":"In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7051090","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In a microfluidic channel, thermocouples were fabricated on the sidewall of microchannel using the three-dimensional photolithography. The thermocouples on the side wall can directly sense the microfluid in the channel, and the accurate temperature measurement can be achieved. Moreover, the thermocouple metals on the sidewall do not make the shadow allowing the observation using the optical microscopy.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
