Electrostatic Rotary Stepper Micromotor for Skew Angle Compensation in Hard Disk Drive

E. Sarajlic, C. Yamahata, M. Cordero, H. Fujita
{"title":"Electrostatic Rotary Stepper Micromotor for Skew Angle Compensation in Hard Disk Drive","authors":"E. Sarajlic, C. Yamahata, M. Cordero, H. Fujita","doi":"10.1109/MEMSYS.2009.4805574","DOIUrl":null,"url":null,"abstract":"Circular data tracks in present-day hard disk drives (HDD) are accessed by a read/write head mounted on a support arm, which is swung by a voice coil drive. The orientation of the head relative to a data track varies with the radial position of the track, causing an increase in data track misregistration and limiting the performance of HDD. We present a rotary micromotor which can be used as a secondary stage actuator to maintain a constant orientation between the head and the tracks during disk operation. This electrostatic stepper micromotor, bulk micromachined in a standard monocrystalline silicon wafer, uses flexure pivots to avoid any frictional contact of the rotor, providing precise, repeatable and reliable bidirectional stepping motion without feedback control. The experimental characterization of a prototype having a diameter of 1.4 mm has demonstrated a rotational range of 26° (+/- 13°) at 75 V, a resolution of 1/6° in a coarse stepping mode and a maximum speed of 1.67°/ms.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2009.4805574","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13

Abstract

Circular data tracks in present-day hard disk drives (HDD) are accessed by a read/write head mounted on a support arm, which is swung by a voice coil drive. The orientation of the head relative to a data track varies with the radial position of the track, causing an increase in data track misregistration and limiting the performance of HDD. We present a rotary micromotor which can be used as a secondary stage actuator to maintain a constant orientation between the head and the tracks during disk operation. This electrostatic stepper micromotor, bulk micromachined in a standard monocrystalline silicon wafer, uses flexure pivots to avoid any frictional contact of the rotor, providing precise, repeatable and reliable bidirectional stepping motion without feedback control. The experimental characterization of a prototype having a diameter of 1.4 mm has demonstrated a rotational range of 26° (+/- 13°) at 75 V, a resolution of 1/6° in a coarse stepping mode and a maximum speed of 1.67°/ms.
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用于硬盘倾斜角补偿的静电旋转步进微电机
在当今的硬盘驱动器(HDD)中,通过安装在支撑臂上的读写头来访问圆形数据轨道,该支撑臂由音圈驱动器摆动。磁头相对于数据磁道的方向随着磁道的径向位置而变化,导致数据磁道错配的增加,限制了硬盘的性能。我们提出了一种旋转微电机,它可以用作二级驱动器,在磁盘操作期间保持磁头和磁道之间的恒定方向。这种静电步进微电机,在标准单晶硅晶片上进行批量微加工,使用柔性枢轴来避免转子的任何摩擦接触,提供精确,可重复和可靠的双向步进运动,无需反馈控制。直径为1.4 mm的原型的实验表征表明,在75 V下旋转范围为26°(+/- 13°),在粗步进模式下分辨率为1/6°,最大速度为1.67°/ms。
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