LEC growth and structural characterization of low-EPD co-doped indium phosphide

R. Fornari, P. Franzosi, J. Kumar, G. Salviati
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Abstract

InP bulk crystals double-doped with Cd and S were investigated in depth by scanning electron microscopy, transmission electron microscopy, and X-ray topography. The investigations confirm that InP:(CdS) presents a lower dislocation density than other n-type material with the same carrier concentration but that it contains two additional microdefects, namely, large and small precipitates that are seen to pin the dislocation lines and to prevent their propagation. The bigger particles appear to be crystalline CdS. The nature of the small particles is not clear.<>
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低epd共掺磷化铟的LEC生长及结构表征
采用扫描电镜、透射电镜和x射线形貌对双掺杂的InP块体晶体进行了深入研究。研究证实,在相同载流子浓度下,InP:(CdS)的位错密度比其他n型材料低,但它含有两个额外的微缺陷,即大沉淀和小沉淀,它们可以固定位错线并阻止其扩展。较大的粒子似乎是晶体cd。这些小颗粒的性质尚不清楚。
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