{"title":"Advanced CMOS reliability challenges","authors":"C. Prasad","doi":"10.1109/VLSI-DAT.2014.6834931","DOIUrl":null,"url":null,"abstract":"This work reviews transistors of advanced CMOS process nodes from a reliability perspective and covers some of the important challenges and solutions. Physical mechanisms for various modes are investigated for 65nm to 22nm nodes with focus on disruptive changes such as HK/MG and Tri-gate/FinFET. The importance of modeling non-idealities and variation is also emphasized, and projections are made for scaling to sub-20nm with comparisons to existing research.","PeriodicalId":267124,"journal":{"name":"Technical Papers of 2014 International Symposium on VLSI Design, Automation and Test","volume":"38 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Papers of 2014 International Symposium on VLSI Design, Automation and Test","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSI-DAT.2014.6834931","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9
Abstract
This work reviews transistors of advanced CMOS process nodes from a reliability perspective and covers some of the important challenges and solutions. Physical mechanisms for various modes are investigated for 65nm to 22nm nodes with focus on disruptive changes such as HK/MG and Tri-gate/FinFET. The importance of modeling non-idealities and variation is also emphasized, and projections are made for scaling to sub-20nm with comparisons to existing research.
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