Complementary Incentives of Yield and Reliability for Ensuring Defect Detections in Wafer-Manufacturing

Abstract

Yield defects and reliability defects in wafer- manufacturing are often related. To vividly illustrate in detail the complementary incentives of yield and reliability, we have provided in this paper a case study of ensuring the defect detections. In addition, an extensive review was also provided for the first time from I-V characteristics of defects to stress test failures at product sort. Our broad and multidisciplinary efforts have safeguarded the defect detections in quality manufacturing.