Y. Du, Guangya Zhou, K. Cheo, Qingxin Zhang, H. Feng, F. Chau
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引用次数: 0
Abstract
A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7deg and scanning frequency of 20.35 kHz are experimentally achieved.
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