High-efficiency GaN-based LED with patterned SiO2 passivation layer and discontinuous current block layer

Jie Deng, Wei-ling Guo, Jianpeng Tai, Zehua Lu, Mengmei Li, Qinghua Yu
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Abstract

GaN-based blue light-emitting diodes (LEDs) with patterned SiO2 passivation layer and discontinuous current block layer (CBL) has been proposed and fabricated. The patterned SiO2 passivation layer is inserted between Indium tin oxide (ITO) and P/N electrodes, and has a series of windows under the P and N electrodes, it can not only isolate the N electrode from the sidewall to prevent leakage, but also can re-contact the P electrode with ITO to form discontinuous P electrode structure and current injection. For the etching of active region, we use the method that partially etched to form a discontinuous N-GaN mesa, which can reduce the loss of the active area and improve the light emission intensity of the LEDs. It can be called discontinuous N-electrode structure. In addition, the discontinuous CBL deposited between P-GaN and ITO can increase the light extract efficiency from the active region under the P electrode compared to the conventional LED structure. As a result, at an injection current of 150mA, the light output power of the LED with patterned SiO2 passivation layer and discontinuous CBL was 7.06% higher than that of conventional structure LED. What’s more, at 50mA, the LED with the patterned SiO2 passivation layer and discontinuous CBL structure shows the lower forward voltage of 3.29V compared with the conventional LED of 3.41V.
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具有图案化SiO2钝化层和不连续电流块层的高效氮化镓基LED
提出并制备了具有图像化SiO2钝化层和不连续电流块层的氮化镓基蓝色发光二极管。在氧化铟锡(ITO)和P/N电极之间插入图案化的SiO2钝化层,并在P和N电极下方有一系列窗口,它不仅可以将N电极与侧壁隔离以防止泄漏,还可以使P电极与ITO重新接触,形成不连续的P电极结构和电流注入。对于有源区域的蚀刻,我们采用部分蚀刻的方法形成不连续的N-GaN台面,可以减少有源区域的损耗,提高led的发光强度。可称之为不连续n电极结构。此外,与传统的LED结构相比,沉积在P- gan和ITO之间的不连续CBL可以提高P电极下活性区域的光提取效率。结果表明,在注入电流为150mA时,具有图案SiO2钝化层和不连续CBL的LED的光输出功率比常规结构LED高7.06%。此外,在50mA时,具有图案SiO2钝化层和不连续CBL结构的LED的正向电压为3.29V,而传统LED的正向电压为3.41V。
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