{"title":"Fast and high-precision 3D tracking and position measurement with MEMS micromirrors","authors":"V. Milanovic, W. K. Lo","doi":"10.1109/OMEMS.2008.4607834","DOIUrl":null,"url":null,"abstract":"We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607834","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 19
Abstract
We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.
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