Fast and high-precision 3D tracking and position measurement with MEMS micromirrors

V. Milanovic, W. K. Lo
{"title":"Fast and high-precision 3D tracking and position measurement with MEMS micromirrors","authors":"V. Milanovic, W. K. Lo","doi":"10.1109/OMEMS.2008.4607834","DOIUrl":null,"url":null,"abstract":"We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2008.4607834","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 19

Abstract

We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5 m distance with 16-bit precision, or < = 20 mum precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10 mum to 1.5 mm, depending on distance.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
利用MEMS微镜进行快速、高精度的3D跟踪和位置测量
我们演示了三维体中对象的实时快速运动跟踪,同时获得其精确的XYZ坐标。两个独立的扫描MEMS微镜子系统以20 kHz的闭环跟踪对象。一个能够跟踪全速人手运动的演示系统提供5米距离的位置信息,精度为16位,或者在X和Y轴上(上/下,左/右)的精度< = 20 μ m,深度(z轴)的精度从10 μ m到1.5 mm,具体取决于距离。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Optical add/drop filter based on dual curved photonic crystal resonator MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators A varifocal micromirror with pure parabolic surface using bending moment drive Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1