A. Goryu, A. Ikedo, K. Takei, K. Sawada, T. Kawano, M. Ishida
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引用次数: 1
Abstract
We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length ≫10¿m) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip angles ranging from 15° to 50°. The penetration capability of the nanoscale-tip microprobes was demonstrated, using finite element modeling (FEM) simulations and penetration tests with a gelatin as tissue/cell.
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