Manuel Potércau, A. Curutchet, R. D’Esposito, M. De matos, S. Frégonèse, T. Zimmer
{"title":"A test structure set for on-wafer 3D-TRL calibration","authors":"Manuel Potércau, A. Curutchet, R. D’Esposito, M. De matos, S. Frégonèse, T. Zimmer","doi":"10.1109/ICMTS.2016.7476182","DOIUrl":null,"url":null,"abstract":"This paper presents a new test structure set for on-wafer 3D-TRL calibration. It permits to define the reference plane below the Back-End-of-Line on Metal 1 level. Only one additional test structure is necessary to account for the coupling between input and output ports. Measurement accuracy below 1fF has been achieved.","PeriodicalId":344487,"journal":{"name":"2016 International Conference on Microelectronic Test Structures (ICMTS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2016.7476182","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper presents a new test structure set for on-wafer 3D-TRL calibration. It permits to define the reference plane below the Back-End-of-Line on Metal 1 level. Only one additional test structure is necessary to account for the coupling between input and output ports. Measurement accuracy below 1fF has been achieved.
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