A new on-state drain-bias TDDB lifetime model and HCI effect on drain-bias TDDB of ultra thin oxide

P. Liao, C. Chen, J. Young, Y. Tsai, C.J. Wang, K. Wu
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引用次数: 6

Abstract

For the first time, a new drain-bias TBD lifetime model is proposed to precisely predict at various Vd, Vg and channel length for ultra thin oxide. The TBD lifetime with drain-bias can be decoupled to small voltage drop at drain-side increased TBD lifetime and hot carrier effect (HCI) degraded the TBD lifetime. The mechanism of oxide breakdown with drain-bias is also well understood as oxide traps distributed from the source side to the center of channel induce the oxide breakdown.
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超薄氧化物漏偏置TDDB寿命新模型及HCI对漏偏置TDDB的影响
首次提出了一种新的漏偏置TBD寿命模型,可以精确预测超薄氧化物在不同Vd、Vg和通道长度下的寿命。漏极偏置的TBD寿命可以解耦到漏极侧的小电压降增加了TBD寿命,而热载子效应(HCI)降低了TBD寿命。具有漏极偏置的氧化物击穿机制也被很好地理解,因为从源侧到通道中心分布的氧化物陷阱诱导了氧化物击穿。
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